Wet oxidation of thin AlAs in cylindrical composite of GaAs/AlAs/GaAs

Ko, Sun–Chien; Lee, Sanboh; Chou, Yi-Lun

doi:10.1016/j.matchemphys.2011.09.026

Cited by 1 publication

(1 citation statement)

References 21 publications

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“…Both of this cases can be seen in data reported by Ochiai et al [46], which allows the assignment of oxidation regimes to others data depending on the temperature dependent oxidation speed. In figure 7 multiple models are plotted and it can be seen that the data reported by Ko et al [47] exhibits a diffusion limited behavior whereas the data provided by Fabbro et al [48] is in the reaction limited regime as only short oxidation lengths have been observed. When comparing the models with the estimated oxidation speed of the stress test temperatures of 335 • C-460 • C are predicted.…”

Section: Oxidation Ratesmentioning

confidence: 90%

Electrical-stress driven oxidation in 940 nm oxide-confined VCSEL

Pusterhofer¹,

Fabbro²,

Coppeta³

et al. 2021

Semicond. Sci. Technol.

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In this work, accelerated stress tests have been performed on oxide confined vertical cavity surface emitting LASER arrays to study the formation of defects degrading the performance of the device. One such defect is an additional oxide volume forming at the oxide aperture edge, which is used for optical and electrical confinement. After producing an additional oxide volume the sample was investigated using transmission electron microscopy to estimate the oxidation speed. To produce further insights into the formation process, the temperature during such a stress test was estimated by experimentally measuring the thermal resistance, and by a thermodynamic transport simulation. Both methods produced very similar results showing a temperature increase of around 22 K for a dissipated power of 3.5 mW per emitter. However this temperature rise is very small when compared to oxidation models found in literature and should not be enough to promote the oxidation. This indicates the presence of a new enhanced oxidation mechanism, which could be connected to corrosion based failure mechanisms reported in literature.

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Section: Oxidation Ratesmentioning

confidence: 90%