2014
DOI: 10.1021/nl500999r
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What Does Annealing Do to Metal–Graphene Contacts?

Abstract: Annealing is a postprocessing treatment commonly used to improve metal–graphene contacts with the assumption that resist residues sandwiched at the metal–graphene contacts are removed during annealing. Here, we examine this assumption by undertaking a systematic study to understand mechanisms that lead to the contact enhancement brought about by annealing. Using a soft shadow-mask, we fabricated residue-free metal–graphene contacts with the same dimensions as lithographically defined metal–graphene contacts on… Show more

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Cited by 114 publications
(127 citation statements)
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“…In practice, closetoperfect interfaces require the removal or prevention of surface impurities (such as resist residues), as well as an annealing process. For example, in graphene, during annealing, the carbon atoms can dissolve into the contact metal (Ni or Co) and thus form strong covalent bonds, which contribute towards a much smaller contact resistance 44 . For multilayer TMDC SCs, only the top layer can be hybrid ized by metal top contacts, and thus only the vdW gap between the metal and the top layer of the TMDC is eliminated, as predicted by DFT 35,42 .…”
Section: Interface Geometrymentioning
confidence: 99%
“…In practice, closetoperfect interfaces require the removal or prevention of surface impurities (such as resist residues), as well as an annealing process. For example, in graphene, during annealing, the carbon atoms can dissolve into the contact metal (Ni or Co) and thus form strong covalent bonds, which contribute towards a much smaller contact resistance 44 . For multilayer TMDC SCs, only the top layer can be hybrid ized by metal top contacts, and thus only the vdW gap between the metal and the top layer of the TMDC is eliminated, as predicted by DFT 35,42 .…”
Section: Interface Geometrymentioning
confidence: 99%
“…During metallization, covalent contacts are formed at the vacant sites, whereas top contacts are formed in the remaining areas. The phenomenon of carbon dissolution due to annealing was explained by Leong et al in their study on the effect of annealing on metal-graphene interfaces [45]. Annealing their Ni-contacted graphene device at 300 o C for 1 h showed a much higher Dband Raman intensity than just annealed graphene and Nicontacted graphene without anneal, which correlates to the carbon dissolution.…”
Section: Formation Of Covalent Contacts By Annealingmentioning
confidence: 90%
“…Both of the I-V of each lead are linear and the adjacent leads are electrically insulating before and after annealing. The decrease of resistance in G/SiC leads after annealing can be attributed to either desorption of species from the graphene surface or by a modified contact resistance between Au and G/SiC after the thermal annealing step [42]. Statistics Crystals 2017, 7, 378 3 of 11 on the resistivity of G/SiC leads before annealing show that the average resistivity of 11 leads is 11 kΩ/square.…”
Section: Characterization Of Graphene Electrodesmentioning
confidence: 99%