White light interferometry applications in nanometrology

Damian, V.; Bojan, Mihaela; Şchiopu, Paul; Iordache, I.; Ioniţă, Bogdan; Apostol, D.

doi:10.1117/12.823664

Cited by 7 publications

(4 citation statements)

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“…WLI can be used in several applications related to the Photonics industry. The main application is related to surface profiling of the circuits, which not only includes surface roughness, but also step height and 3D characterization (5).…”

Section: Applications In Photonicsmentioning

confidence: 99%

Technological challenges in the measurement of photonic products with white light interferometry

Ansari,

Franco Soares de Bem,

Shenbaga Manogara Pandian

2024

Optics and Photonics for Advanced Dimensional Metrology III

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There are manifold challenges in the measurement of photonic products with white light interferometry (WLI), especially where near-or inline measurement is needed. To face these challenges, new approaches in software and hardware are required. In this presentation, the use of a new white light interferometry sensor with advanced features and relevant unique capabilities is highlighted, with applications in the fields of optical and Photonics Integrated Circuit (PIC) development and production.

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Section: Applications In Photonicsmentioning

confidence: 99%

Technological challenges in the measurement of photonic products with white light interferometry

Ansari,

Franco Soares de Bem,

Shenbaga Manogara Pandian

2024

Optics and Photonics for Advanced Dimensional Metrology III

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“…There is also a way of directly examining the cross-section of the blind hole by polishing [9], although objective depth measurement is problematic owing to grinding parameters. To objectively and accurately measure, numerous measuring tools and methodologies have been proposed [10][11][12][13].…”

Section: Introductionmentioning

confidence: 99%

“…White light interferometry is a high-precision measuring technique that produces threedimensional geometric data such as length, surface profile, roughness, and depth. [12]. Mezzapesa [13] used a laser self-mixing interferometry approach to address the drawbacks of the existing double-arm interferometer method to measure ultra-high-speed laser drilling holes in a metal plate with a resolution of 0.41 µm.…”

Section: Introductionmentioning

confidence: 99%

Hole Depth Prediction in a Femtosecond Laser Drilling Process Using Deep Learning

et al. 2023

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In high-aspect ratio laser drilling, many laser and optical parameters can be controlled, including the high-laser beam fluence and number of drilling process cycles. Measurement of the drilled hole depth is occasionally difficult or time consuming, especially during machining processes. This study aimed to estimate the drilled hole depth in high-aspect ratio laser drilling by using captured two-dimensional (2D) hole images. The measuring conditions included light brightness, light exposure time, and gamma value. In this study, a method for predicting the depth of a machined hole by using a deep learning methodology was devised. Adjusting the laser power and the number of processing cycles for blind hole generation and image analysis yielded optimal conditions. Furthermore, to forecast the form of the machined hole, we identified the best circumstances based on changes in the exposure duration and gamma value of the microscope, which is a 2D image measurement instrument. After extracting the data frame by detecting the contrast data of the hole by using an interferometer, the hole depth was predicted using a deep neural network with a precision of within 5 μm for a hole within 100 μm.

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“…This paper first highlights SAW devices technology overview before discussing optoelectronic techniques for characterization of SAW devices. A large variety of optical measurement techniques and methods for SAW devices have been proposed between others: knife-edge techniques [10], interferometric techniques [1] [2] [7], and diffraction techniques [1] [8]. Full information on the SAW field for a general broadband wave disturbance can be most simply obtained by real time detection, and the knife-edge and interferometric techniques have proved most successful for this.…”

Section: Introductionmentioning

confidence: 99%

Integration of optoelectronics and SAW technology

et al. 2010

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The number of radio frequency surface acoustic wave (SAW) filters produced presently exceeds 3 billion per year. The demand for high-frequency SAW filters for telecommunications and remote sensing, has led to extensive research, focusing on new SAW microdevices. SAW devices have shown compact structures, small size, low cost, high sensitivity and fast response. The need of miniaturized systems, with high sensitivity and low energy has motivated the need to integrate on the same substrate all the structure of SAW device and connecting electronic circuits. As a consequence, many types of methods of both constructive and operating characterization of SAW devices have been developed. This paper provides a short introduction regarding the developed level of SAW microdevices and describes the results of literature investigation research of optoelectronic techniques for constructive characterization of SAW microdevices. Further research will be done into the determination of SAW parameters such as the amplitude of surface wave, the velocity of wave propagation on the surface of the piezoelectric substrate. Substrates of quartz, lithium tantalite (LiTaO 3 ) and lithium niobate (LiNbO 3 ), are piezoelectric materials commonly used in manufacturing of SAW devices, but these materials are not compatible with the integrated circuit (IC) technology. Three optoelectronic measurement techniques are known for detection of surface acoustic waves: diffraction grating technique, the knife-edge technique, and the detection of ultrasonic vibrations using optical interferometry. The research work given in this paper concentrates on describing of optoelectronic techniques used for constructive characterization of SAW microdevices. Finally, we try to draw some conclusion where: optoelectronic techniques are predicted to be one of the fundamental measurement methods for measurement of future SAW microdevices.

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White light interferometry applications in nanometrology

Cited by 7 publications

References 0 publications

Technological challenges in the measurement of photonic products with white light interferometry

Technological challenges in the measurement of photonic products with white light interferometry

Hole Depth Prediction in a Femtosecond Laser Drilling Process Using Deep Learning

Integration of optoelectronics and SAW technology

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