White light interferometry for surface profiling with a colour CCD

Kumar, Umesh; Wang, Haifeng; Mohan, N. Krishna; Kothiyal, M. P.

doi:10.1016/j.optlaseng.2012.02.002

Cited by 56 publications

(31 citation statements)

References 10 publications

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“…The traditional contact-detection method, for example, Micro-CMM [1,2] has not satisfied the requirements of fast, highly accurate, and non-destructive detection in the microelectronics manufacturing industry. Therefore, many scholars-both domestic and foreign-have proposed non-contact optical measurement methods, such as confocal microscopy [3,4], white-light interferometry [5,6], and microscopic fringe projection [7][8][9][10]. Even if the resolution of confocal microscopy and whitelight interferometry reach nano-level, the measurement range is merely several millimeters.…”

Section: Introductionmentioning

confidence: 99%

Structure light telecentric stereoscopic vision 3D measurement system based on Scheimpflug condition

Mei

Gao

Lin

et al. 2016

Optics and Lasers in Engineering

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Section: Introductionmentioning

confidence: 99%

Structure light telecentric stereoscopic vision 3D measurement system based on Scheimpflug condition

Mei

Gao

Lin

et al. 2016

Optics and Lasers in Engineering

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“…Authors accessed interference intensity information from the three channels of the colour CCD simulating three-wavelength measurements. This makes the data acquisition as simple as in single wavelength interferometry [6].…”

Section: Introductionmentioning

confidence: 99%

On Shearography Testing of Tires Separations

Hajská¹,

Koštial

Kodym

et al. 2015

Mechanical and Materials Engineering of Modern Structure and Component Design

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The paper deals with the systematic experimental study of tires wear accompanied by separation created in tires of different construction exposed to dynamic loading. 12 pieces of tires with the dimensions of 225/75 R 16 C with the same tread pattern were manufactured for the test in order to examine the impact on the material and design changes on the spread of separations in a tire. The atlas of separation is presented. The results of separation detection obtained by contact-less shearography are compared with those of optical. Graphic relevant analysis of tire wearing process is effectuated.

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“…The white-light interferometry (WLI) is an attractive technique that is used for absolute measurements [24] and the measurement of the shape of objects [25], it allows the increase in the system operating range to overcome the fundamental problem that arises in conventional laser interferometry [26], and high resolution and dynamic range may be achieved [27].…”

Section: Introductionmentioning

confidence: 99%

The measurement of the diameter change of a piezoelectric transducer cylinder with the white-light interferometry

Saad

Jiang

Liu

et al. 2014

Optics and Lasers in Engineering

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a b s t r a c tThe measurement of the diameter change of a piezoelectric transducer (PZT) cylinder with the whitelight interferometry is proposed and experimentally demonstrated. One arm of a Mach-Zehnder interferometer (MZI) is wrapped on the PZT cylinder, and the phase change of the interferogram of the MZI is used to determine the diameter change when a DC voltage is applied on the PZT cylinder. The Fourier transform white-light interferometry is used for recovering the phase change of the interferometer. The experimental results show that the diameter change resolution of 0.8 nm for the PZT cylinder with diameter of 40 mm is achieved.

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White light interferometry for surface profiling with a colour CCD

Cited by 56 publications

References 10 publications

Structure light telecentric stereoscopic vision 3D measurement system based on Scheimpflug condition

Structure light telecentric stereoscopic vision 3D measurement system based on Scheimpflug condition

On Shearography Testing of Tires Separations

The measurement of the diameter change of a piezoelectric transducer cylinder with the white-light interferometry

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