“…As one kind of traditional self-aligned silicide process, ion implantation is also an artificial means to effectively construct radiative recombination centers (optical defects and impurity centers) in Si crystal [14][15][16][17][18]. A variety of ions [15,16], such as P, H, He, B, Cu and Fe, and even rare-earth elements, such as Tb and Er ions [17,18], were implanted into the silicon crystal to modulate the optical properties of silicon and thereby improve its optical efficiency.…”