Applied Optical Metrology V 2023
DOI: 10.1117/12.2675503
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Why you should pay attention to international standards in optical metrology

Peter J. de Groot,
Han Haitjema,
Mark Malburg

Abstract: Optical metrology is a driving force in advancing industries ranging from consumer electronics to components for energy and transportation. Despite this progress, there is considerable wasted effort attributable to misleading instrument specifications, inconsistent calibrations, and ambiguous data processing procedures. Confusing statements of accuracy and uncertainty, inconsistencies in filtering and parameter calculations, and misunderstandings about measurement principles and limitations undermine confidenc… Show more

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