Wide-Field-of-View, Large-Area Long-Wave Infrared Silicon Metalenses

Lin, Hung-I.; Geldmeier, Jeffrey; Baleine, Erwan; Yang, Fan; An, Sensong; Pan, Ying; Rivero-Baleine, Clara; Gu, Tian; Hu, Juejun

doi:10.1021/acsphotonics.4c00013

Cited by 5 publications

References 51 publications

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Inverse Design of Aberration-Corrected Hybrid Metalenses for Large Field of View Thermal Imaging Across the Entire Longwave Infrared Atmospheric Window

Zang,

Ren,

Shi

et al. 2024

ACS Nano

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Long wave infrared (LWIR) cameras play a pivotal role across diverse applications due to their distinctive features. The growing demand for highperformance thermal imaging optics, characterized by a broad working bandwidth, large field of view (FOV), aberration-free design, lightweight construction, compactness, and cost-effectiveness, poses significant challenges for LWIR lens design. Here, we propose an inverse design method for LWIR hybrid metalenses, specifically aiming to achieve aberration-corrected thermal imaging with both a large FOV and a broad working bandwidth. Our approach involves optimizing phase profiles of metalens' unit cells guided by a loss function that compares the hybrid lens design to diffraction-limited results for various incident angles and wavelengths. As a result, we demonstrate an aberration-corrected thermal camera with a 30°FOV and an achromatic working bandwidth spanning the entire LWIR atmospheric window (8 to 14 μm). Significantly, the total optical path length, the entrance pupil to the sensor plane of the charge-coupled device (CCD), is a mere 13.6 mm. Our work merits advantages in the FOV, working bandwidth, and compactness, which surpass state-of-the-art LWIR hybrid metalens designs and find numerous imaging and sensing applications.

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Inverse Design of Aberration-Corrected Hybrid Metalenses for Large Field of View Thermal Imaging Across the Entire Longwave Infrared Atmospheric Window

Zang,

Ren,

Shi

et al. 2024

ACS Nano

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Broadband achromatic thermal metalens with a wide field of view based on wafer-level monolithic processes

Chen,

Hsu,

Zeng

et al. 2024

Applied Physics Letters

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We present a monolithic metalens free of chromatic aberration over the 8–12 μm wavelength range for thermal imaging. The metalens consists of nano-donut-pillars for dispersion engineering. The proposed metalens design is based on a telecentric optical system, which effectively eliminates off-focus distortion and aberration, enhancing overall imaging quality. Offering a 90° field of view, the metalens ensures uniform focal spot sizes within a 45° field angle across the working wavelength. This enables the capture of high-quality thermal images with sharp images and minimal distortion. With a diameter of 5.75 mm, the metalens is suitable for integration into commercial thermal imaging cameras. The nano-donut-pillar structure of the metalens allows for relatively straightforward mass production, involving i-line stepper lithography and silicon deep etching processes.

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