Wind-power generators based on ZnO piezoelectric thin films on stainless steel substrates

Chang, Wei‐Der; Chen, Ying–Chung; Lin, Re-Ching; Cheng, Chien‐Chuan; Kao, K. C.; Huang, Yu‐Chang

doi:10.1016/j.cap.2010.11.007

Cited by 28 publications

(12 citation statements)

References 15 publications

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“…The obtained surface morphologies of AlN thin films appeared to be dense with smooth surfaces and strongly textured columnar structures. As is believed, hexagonal crystals exhibit piezoelectricity of unity with a (002) preferred orientation [20,21].…”

Section: Structural and Morphological Properties Of Aln Thinmentioning

confidence: 84%

Design and Fabrication of Nanoscale IDTs Using Electron Beam Technology for High‐Frequency SAW Devices

Shih

Chen

Chang

et al. 2014

Journal of Nanomaterials

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High-frequency Rayleigh-mode surface acoustic wave (SAW) devices were fabricated for 4G mobile telecommunications. The RF magnetron sputtering method was adopted to grow piezoelectric aluminum nitride (AlN) thin films on the Si3N4/Si substrates. The influence of sputtering parameters on the crystalline characteristics of AlN thin films was investigated. The interdigital transducer electrodes (IDTs) of aluminum (Al) were then fabricated onto the AlN surfaces by using the electron beam (e-beam) direct write lithography method to form the Al/AlN/Si3N4/Si structured SAW devices. The Al electrodes were adopted owing to its low resistivity, low cost, and low density of the material. For 4G applications in mobile telecommunications, the line widths of 937 nm, 750 nm, 562 nm, and 375 nm of IDTs were designed. Preferred orientation and crystalline properties of AlN thin films were determined by X-ray diffraction using a Siemens XRD-8 with CuKαradiation. Additionally, the cross-sectional images of AlN thin films were obtained by scanning electron microscope. Finally, the frequency responses of high-frequency SAW devices were measured using the E5071C network analyzer. The center frequencies of the high-frequency Rayleigh-mode SAW devices of 1.36 GHz, 1.81 GHz, 2.37 GHz, and 3.74 GHz are obtained. This study demonstrates that the proposed processing method significantly contributes to high-frequency SAW devices for wireless communications.

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Section: Structural and Morphological Properties Of Aln Thinmentioning

confidence: 84%

Design and Fabrication of Nanoscale IDTs Using Electron Beam Technology for High‐Frequency SAW Devices

Shih

Chen

Chang

et al. 2014

Journal of Nanomaterials

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“…This microdevice can generate 0.975 V at resonant frequency of 592 Hz; however, this frequency value is higher than the frequency of the mechanical vibrations in the environment. On the other hand, Chang et al [12] designed a pVEH cantilever composed by a ZnO film deposited on a flexible stainless-steel substrate, a Cu layer and an additional mass (0.57 g). This cantilever at resonance (75 Hz) can convert the wind energy into electrical energy, generating a voltage of 10.5 V. In other research, Wang and Du [13] fabricated two pVEH microdevices using a silicon substrate, a SiO 2 layer, two Au/Ti electrodes and a ZnO layer.…”

Section: Introductionmentioning

confidence: 99%

Electromechanical Modeling of a Piezoelectric Vibration Energy Harvesting Microdevice Based on Multilayer Resonator for Air Conditioning Vents at Office Buildings

et al. 2019

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Piezoelectric vibration energy harvesting (pVEH) microdevices can convert the mechanical vibrations to electrical voltages. In the future, these microdevices can provide an alternative to replace the electrochemical batteries, which cause contamination due to their toxic materials. We present the electromechanical modeling of a pVEH microdevice with a novel resonant structure for air conditioning vents at office buildings. This electromechanical modeling includes different multilayers and cross-sections of the microdevice resonator as well as the air damping. This microdevice uses a flexible substrate and it does not include toxics materials. The microdevice has a resonant structure formed by multilayer beams and U-shape proof mass of UV-resin (730 μm thickness). The multilayer beams contain flexible substrates (160 μm thickness) of polyethylene terephthalate (PET), two aluminum electrodes (100 nm thickness), and a ZnO layer (2 μm thickness). An analytical model is developed to predict the first bending resonant frequency and deflections of the microdevice. This model considers the Rayleigh and Macaulay methods, and the Euler-Bernoulli beam theory. In addition, the electromechanical behavior of the microdevice is determined through the finite element method (FEM) models. In these FEM models, the output power of the microdevice is obtained using different sinusoidal accelerations. The microdevice has a resonant frequency of 60.3 Hz, a maximum deflection of 2.485 mm considering an acceleration of 1.5 m/s2, an output voltage of 2.854 V and generated power of 37.45 μW with a load resistance of 217.5 kΩ. An array of pVEH microdevices connected in series could be used to convert the displacements of air conditioning vents at office buildings into voltages for electronic devices and sensors.

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“…Most existing researches have focused on electricalmechanical coupling effects from various ambient energy sources with using PZT [1] and ZnO [2][3][4][5][6]. Due to its high flexibility, biocompatibility and inexpensive, PVDF is an important piezoelectric polymer in energy conversion applications for micro-electric mechanical device, electromechanical actuators and energy harvester.…”

Section: Introductionmentioning

confidence: 99%

Hollow cylindrical near-field electrospining high β-phase crystallisation of large PVDF nanofiber array for flexible energy conversion

Liu

Pan

et al. 2012

2012 IEEE Sensors

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This study used near-field electrospining (NFES) on hollow cylindrical process to fabricate permanent piezoelectricity of polyvinylidene fluoride (PVDF)/multi-walled carbon nanotube (MWCNT) piezoelectric nanofibers. Under insitu electric poling and mechanical stretching during NFES process (X-Y stage 50 mm/sec, rotating velocity 1300 r.p.m, electric field 1×10 7 V/m, PVDF solution concentration 16 wt%, and 0.03 wt% MWCNT), high β-phase crystallization of large PVDF nanofiber array were demonstrated. From the observation of actuation property, a fixed-fixed single nanofiber was tested under different DC voltage supply. Moreover, flexible nano-harvesters based on the integration of large numbers of nanofibers in series were mounted in a circular rubber band structure to generate high electric potential. Thus, the improvement of NFES process shows interesting potentials in various applications including power scavenge, sensing and actuation.I.

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Wind-power generators based on ZnO piezoelectric thin films on stainless steel substrates

Cited by 28 publications

References 15 publications

Design and Fabrication of Nanoscale IDTs Using Electron Beam Technology for High‐Frequency SAW Devices

Design and Fabrication of Nanoscale IDTs Using Electron Beam Technology for High‐Frequency SAW Devices

Electromechanical Modeling of a Piezoelectric Vibration Energy Harvesting Microdevice Based on Multilayer Resonator for Air Conditioning Vents at Office Buildings

Hollow cylindrical near-field electrospining high β-phase crystallisation of large PVDF nanofiber array for flexible energy conversion

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Wind-power generators based on ZnO piezoelectric thin films on stainless steel substrates

Cited by 28 publications

References 15 publications

Design and Fabrication of Nanoscale IDTs Using Electron Beam Technology for High‐Frequency SAW Devices

Design and Fabrication of Nanoscale IDTs Using Electron Beam Technology for High‐Frequency SAW Devices

Electromechanical Modeling of a Piezoelectric Vibration Energy Harvesting Microdevice Based on Multilayer Resonator for Air Conditioning Vents at Office Buildings

Hollow cylindrical near-field electrospining high &#x03B2;-phase crystallisation of large PVDF nanofiber array for flexible energy conversion

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Product

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Hollow cylindrical near-field electrospining high β-phase crystallisation of large PVDF nanofiber array for flexible energy conversion