Wire-grid diffraction gratings used as polarizing beam splitter for visible light and applied in liquid crystal on silicon

Xu, Man; Urbach, H. P.; Boer, Dick K. G. de; Cornelissen, Hugo J.

doi:10.1364/opex.13.002303

Cited by 106 publications

(50 citation statements)

References 11 publications

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“…Furthermore, WGPs can be applied for a variety of applications including illumination, laser optics, high-lumen projectors, and imaging devices. [6][7][8][9][10] For industrialization of WGPs, considerable efforts have been made to develop fabrication methods that are low in cost.…”

Section: Introductionmentioning

confidence: 99%

Design and Fabrication of Wire Grid Polarizer by Nanoimprinting and Glancing Angle Deposition Processes

et al. 2017

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We report a simple and cost-effective fabrication method for a wire grid polarizer. The wire grid polarizer was fabricated by incorporating UV nanoimprinting and glancing angle deposition processes. A silicon pattern with a 40 nm line width, 100 nm pitch, and 100 nm height was fabricated by electron beam (E-beam) lithography and reactive ion etching processes. The UV nanoimprinting process was performed on a glass substrate and aluminum nanowires, with a height of 70 nm, were subsequently generated with a glancing angle deposition process. P-polarization transmittance above 55% and an extinction ratio of 31.1 6.1 were measured in the visible wavelength range.

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Section: Introductionmentioning

confidence: 99%

Design and Fabrication of Wire Grid Polarizer by Nanoimprinting and Glancing Angle Deposition Processes

et al. 2017

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“…The polarising beam splitter (PBS), which can split an arbitrarily polarised incident beam into two orthogonally polarised beams, has a wide range of applications such as optical fiber telecommunications, magneto-optic data storage, imaging systems and many other potential fields [1][2][3][4][5]. Since a PBS is always integrated into a multifunctional optoelectronic device in photonic integrated circuits (PICs), a compact PBS is beneficial; suffering from their bulky volume and heavy weight, a conventional PBS (birefringent crystal prism or 45° right-angle prism with multilayer thin film) is cumbersome and would hinder the integration for PICs applications.…”

Section: Introductionmentioning

confidence: 99%

Ultracompact high-efficiency polarising beam splitter based on silicon nanobrick arrays

et al. 2016

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Since the transmission of anisotropic nano-structures is sensitive to the polarisation of an incident beam, a novel polarising beam splitter (PBS) based on silicon nanobrick arrays is proposed. With careful design of such structures, an incident beam with polarisation direction aligned with the long axis of the nanobrick is almost totally reflected (~98.5%), whilst that along the short axis is nearly totally transmitted (~94.3%). More importantly, by simply changing the width of the nanobrick we can shift the peak response wavelength from 1460 nm to 1625 nm, covering S, C and L bands of the fiber telecommunications windows. The silicon nanobrickbased PBS can find applications in many fields which require ultracompactness, high efficiency, and compatibility with semiconductor industry technologies.

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“…In the 1960s, WGPs operating in the infrared region were fabricated [1][2][3]. Since the 1990s, WGPs for the visible region have been fabricated with nanostructures using electron beam lithography (EBL) [4][5][6][7][8][9]. Wang and coworkers fabricated WGPs by using narrow strips less than 100 nm that could be used over a large range of wavelengths, such as the deep UV to near infrared light [9].…”

Section: Introductionmentioning

confidence: 99%

Extraordinary Optical Transmission Exhibited by Surface Plasmon Polaritons in a Double-Layer Wire Grid Polarizer

et al. 2015

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We fabricate a double-layer wire grid polarizer (WGP) and perform optical characterization to clarify the relationship between the structural and polarization characteristics. For normal incidence, the fabricated double-layer WGP exhibits an extinction ratio of 30.4 dB for a period of 400 nm. The transverse magnetic transmittance peak angle is found to vary with the period of the WGP. The peak shift can be explained on the basis of the extraordinary optical transmittance phenomena exhibited by the surface plasmon polaritons (SPPs) of metal slit structures according to the dispersion curve of the SPP. From the simulation of rigorous coupledwave analysis, it is considered that the incident light passes through the resist layer, followed by the excitation of SPPs at the interface between the resist and Au. Subsequently, the SPPs combine with the transmitted light in the glass substrate, leading to strong transmitted light with transverse magnetic polarization. Therefore, we demonstrate the extraordinary optical transmittance phenomena exhibited by the SPPs by both experiment and simulation.

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Wire-grid diffraction gratings used as polarizing beam splitter for visible light and applied in liquid crystal on silicon

Cited by 106 publications

References 11 publications

Design and Fabrication of Wire Grid Polarizer by Nanoimprinting and Glancing Angle Deposition Processes

Design and Fabrication of Wire Grid Polarizer by Nanoimprinting and Glancing Angle Deposition Processes

Ultracompact high-efficiency polarising beam splitter based on silicon nanobrick arrays

Extraordinary Optical Transmission Exhibited by Surface Plasmon Polaritons in a Double-Layer Wire Grid Polarizer

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