Wireless passive polymer-derived SiCN ceramic sensor with integrated resonator/antenna

Abstract

This paper presents a passive wireless polymer-derived silicon carbonitride (SiCN) ceramic sensor based on cavity radio frequency resonator together with integrated slot antenna. The effect of the cavity sensor dimensions on the Q-factor and resonant frequency is investigated by numerical simulation. A sensor with optimal dimensions is designed and fabricated. It is demonstrated that the sensor signal can be wirelessly detected at distances up to 20 mm. Given the high-temperature stability of the SiCN, the sensor is very promising for high-temperature wireless sensing applications. V

Frequency-dependent conductive behavior of polymer-derived amorphous silicon carbonitride

“…Previous studies, which primarily focused on DC (direct current) behavior, revealed that the conductivity of PDCs could increase by several orders of magnitude with increasing pyrolysis temperature before crystallization [7,18,19]. The increase was believed to be caused by the sp 3 -sp 2 transition of the free-carbon phase [17], which was confirmed recently by Chen et al [20,21] and Wang et al [22] in different PDC systems. It was also demonstrated that PDCs exhibited a typical amorphous semiconducting behavior [23].…”

“…However, AC conductive behavior has never been investigated in detail for polymer-derived ceramics. AC-response not only can reveal more structural information of heterogeneous systems such as PDCs studied here; but also will provide useful information for using the material for many applications, such as wireless sensors [17].…”

“…Compared to polycrystalline SiC-and Si 3 N 4 -based ceramics prepared by powder processing, PDCs possess many unusual and superior properties, including excellent stability against high-temperature decomposition and creep [1][2][3], outstanding oxidation and corrosion resistance [4][5][6], high temperature semiconducting behavior up to 1300°C [7,8], and extremely high piezoresistive effect [9][10][11]. These properties, combined with the direct polymer-to-ceramic process, make PDCs very promising for applications in ceramic fibers [12], ceramic matrix composites [13], energy storage [14], porous components [15], and high-temperature micro-sensors [16,17].…”

Dielectrically-Loaded Cylindrical Resonator-Based Wireless Passive High-Temperature Sensor

“…The thickness and surface roughness of the metal film greatly influence the sensor signal strength [16]. Therefore, the screen-printing process should be smooth to reduce unnecessary loss.…”

Electron transport behavior of polymer‐derived amorphous silicoboron carbonitrides

“…Compared with traditional powder metallurgy‐based and polycrystalline ceramics, PDCs possess unique processing characteristics and structure . In addition, PDCs has demonstrated unique properties and potential applications at high temperatures . Especially, owing to their amorphous nature, the structure and properties of PDCs change significantly depending on the pyrolysis temperature.…”