2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) 2022
DOI: 10.1109/mems51670.2022.9699778
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Wirelessly Powered Micro Soft Bellows Actuator with 3D Helix Coils

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“…Soft bellows actuators are soft actuators that use bellow-shaped geometry as chambers which can inflate or deflate based on designed stimuli, including but not limited to pneumatic [ 33 ], fluidic [ 34 ], electrostatic [ 35 ], and electromagnetic [ 36 ], [ 37 ] activation. Both of the hydraulics-inspired techniques enable actuation without the need for energized parts, unlike electrostatic and electromagnetic actuation.…”
Section: Soft Bellows Actuatorsmentioning
confidence: 99%
“…Soft bellows actuators are soft actuators that use bellow-shaped geometry as chambers which can inflate or deflate based on designed stimuli, including but not limited to pneumatic [ 33 ], fluidic [ 34 ], electrostatic [ 35 ], and electromagnetic [ 36 ], [ 37 ] activation. Both of the hydraulics-inspired techniques enable actuation without the need for energized parts, unlike electrostatic and electromagnetic actuation.…”
Section: Soft Bellows Actuatorsmentioning
confidence: 99%