2020
DOI: 10.1016/j.matpr.2020.11.154
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WITHDRAWN: A review on mems based vibration energy harvester cantilever geometry (2015–2020)

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Cited by 3 publications
(1 citation statement)
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“…Microelectromechanical System (MEMS) actuators are enjoying a lot of industrial interest, with applications ranging from micro-mirrors [1,2] (e.g., for use in video projectors) over energy harvesting devices [3,4] and micro-speakers [5][6][7][8]. The deformations/translations of MEMS devices occurring upon when actuated can vary in nature, depending on the application, e.g., some devices displace, and some twist.…”
Section: Introductionmentioning
confidence: 99%
“…Microelectromechanical System (MEMS) actuators are enjoying a lot of industrial interest, with applications ranging from micro-mirrors [1,2] (e.g., for use in video projectors) over energy harvesting devices [3,4] and micro-speakers [5][6][7][8]. The deformations/translations of MEMS devices occurring upon when actuated can vary in nature, depending on the application, e.g., some devices displace, and some twist.…”
Section: Introductionmentioning
confidence: 99%