The interfacial electronic structures of zinc oxide ͑ZnO͒/copper-phthalocyanine ͑CuPc͒ were investigated by in situ x-ray and ultraviolet photoelectron spectroscopy ͑UPS͒ to determine the effects of air contamination on the ZnO substrate. UPS spectra showed that the 0.2 eV of the interface dipole is generated at the interface of the air exposed ZnO/CuPc while the interface of the annealed ZnO/CuPc generated Ϫ0.2 eV. In both cases, no band bending was observed. On the other hand, band bending at 0.3 eV and an interface dipole of 0.2 eV were observed at the interface of the sputter cleaned ZnO/CuPc. The energy offset between the conduction band maximum of ZnO and the highest occupied molecular orbital of CuPc was determined to be 0.6-0.7 eV for the contaminated ZnO interface while the offset was 1.0 eV for the cleaned ZnO interface. Contaminating moisture has little effect on the offset while the charge transfer was blocked and the offset was decreased in the presence of hydrocarbons. © 2011 American Institute of Physics. ͓doi:10.1063/1.3555440͔In recent years, organic photovoltaic ͑OPV͒ devices have attracted considerable attention due to their low cost, ease of fabrication, and their flexibility. 1 Many research groups have reported on attempts to improve their performances in terms of efficiency and stability. In particular, to overcome the weakness of organic materials, which include short exciton diffusion length and air instability, organicinorganic hybrid structures are generally considered to be promising applications. 2 In this respect, zinc oxide ͑ZnO͒ is the most widely used inorganic semiconductor in this type of hybrid device because of its high transparency, nontoxicity, the ease of fabrication of thin films and nanostructure properties. In addition, ZnO/organic hybrid photovoltaic devices with inverted structures show a more stable performance in air than other organic-only devices. 3 However, this hybrid device is usually contaminated at the organic/inorganic interface, as the result of the ex situ process associated with the different deposition methods between ZnO and the organic material. The presence of this contaminant may lead to interfacial states and the development of a tunneling barrier. 4 Although some concerns exist regarding this type of hybrid device due to the ex situ process used, a detailed understanding of the interfacial electronic structure with organic molecules in hybrid applications of ZnO is not available while the electronic structure and chemical bonding of organic molecules with single crystalline ZnO particles has been investigated. 5 A number of studies regarding the preparation of OPVs using copperphthalocyanine ͑CuPc͒ haves been reported because of the appropriate band gap and desirable absorption properties of CuPc.In this letter, we report on a study of the electronic structure and energy level alignments of the ZnO/CuPc interface using x-ray and ultraviolet photoemission spectroscopy ͑XPS and UPS͒ during the stepwise deposition of CuPc on each ZnO films. The sample...