“…Shape memory alloys (SMAs) offer a combination of novel properties such as the shape memory effect, pseudoelasticity, biocompatibility and a high damping capacity, all of which enable SMAs to be widely used in biomedicine (Lorenza et al, 2005), microelectromechanical systems (MEMS) (Fu et al, 2004), and aerospace engineering (Roh et al, 2004;Yoo et al, 2007). Moreover, when SMA thin film is applied to actuators, it has the following advantages: a low driving voltage, a large force per volume and weight, and a faster response than a bulk SMA actuator (Shin et al, 2005).…”