X-RAY ABSORPTION SPECTROSCOPY STUDY OF THIN <font>ZnO</font> FILMS GROWN BY SINGLE SOURCE CVD ON <font>Si</font>(100)

Koch, M. H.; Hartmann, Andreas; Lamb, Robert N.; Neuber, M.; Walz, J.; Grunze, M.

doi:10.1142/s0218625x97000079

Cited by 8 publications

(8 citation statements)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…(1) Onset of Self-Texture. Recently, the utilization of angle dependent NEXAFS measurements as a “fingerprint” of the symmetry type in films has been demonstrated. , In Figure the O 1s NEXAFS measurements for a ∼500 nm thick, polycrystalline and c -axis oriented ZnO reference film are shown for two different angles, ϑ, between the electric field vector of the synchrotron radiation and the surface plane. For this orientation, the ZnO unit cells are arranged with the c -axis perpendicular to the substrate surface.…”

Section: Resultsmentioning

confidence: 99%

“…The main features can be assigned to CCπ* (at ∼285 eV), CHπ*/COπ* (at ∼288 eV), and CCs* (at ∼293 eV) resonances . For comparison a C 1s NEXAFS spectrum obtained from a ZnO film deposited with no water ambient (thickness 20 Å) is shown in the inset in Figure …”

Section: Resultsmentioning

confidence: 99%

“…

6 C 1s NEXAFS spectra as a function of water ambient used during the film deposition at a surface temperature of 673 K and film thicknesses approximately of 50 Å. The inlet shows the C 1s NEXAFS spectra for a 20 Å thick film deposited without a water ambient …”

Section: Resultsmentioning

confidence: 99%

See 2 more Smart Citations

Self-Texture in the Initial Stages of ZnO Film Growth

Koch¹,

Hartmann²,

Lamb³

et al. 1997

J. Phys. Chem. B

Self Cite

View full text Add to dashboard Cite

X-ray absorption spectroscopy has been used to investigate the self-texture of ZnO films grown on Si(100) (lattice-mismatched substrate) by single-source chemical vapor deposition (SS-CVD) using Zn 4 O(acetate) 6 as precursor. For this system nonepitaxial growth of polycrystalline, c-axis oriented films can be controlled by addition of a water ambient during the deposition for a large variety of substrates. Angle dependent near edge X-ray absorption fine structure spectroscopy (NEXAFS) was used to study the orientation of the adsorbent molecules as a function of both water ambient used during the deposition and film thickness. The onset of self-structuring under optimum growth conditions (highest water pressure, P H 2 O ) 5 × 10 -4 mbar) is found to occur at film thicknesses on the order of 50 Å. The role of the water ambient during the film deposition is discussed using a kinetic model in which lattice stabilization due to filling of oxygen vacancies promotes the film crystallization. The model is used to explain the measured changes in the atomic environment of the oxygen atoms in the deposited ZnO films with variation in ambient water used. The interfacial restrictions in nonepitaxial CVD film growth are discussed. Our results indicate that in addition to structural restrictions due to lattice mismatch the chemical reactivity of the substrate material clearly must be considered.

show abstract

Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

See 1 more Smart Citation

Self-Texture in the Initial Stages of ZnO Film Growth

Koch¹,

Hartmann²,

Lamb³

et al. 1997

J. Phys. Chem. B

Self Cite

View full text Add to dashboard Cite

show abstract

“…conc.) compared to carbon free sputtered films, this carbon being situated in the buffer layer and the grain boundaries of the crystallites 16,17 . TEM analysis of these same films indicated that while the crystallites were c-axis oriented, there was no preferred orientation of the a,b-axes within each column i.e.…”

Section: Atomic Force Microscopy Measurements (Local Piezoelectric Efmentioning

confidence: 99%

<title>Physiochemical characteristics of piezoelectric zinc oxide films grown by single-source chemical vapor deposition</title>

Lee

Mar²,

Hartmann

et al. 2001

Smart Materials

Self Cite

View full text Add to dashboard Cite

Zinc oxide thin films were deposited onto chromium coated silicon dioxide wafers using Single Source Chemical Vapour Deposition (SS CVD). The physicochemical properties of these films were then characterised using X-ray Photoelectron Spectroscopy (XPS), X-ray Diffraction (XRD) and Scanning Electron Microscopy (SEM). The physicochemical profile generated from these measurements was then compared to the piezoelectric properties of the films. The piezoelectric d 33 coefficient of the films was determined using Optical Interferometry and Atomic Force Microscopy (AFM). It was found that the AFM measurements gave a d 33 piezoelectric constant of 12±3 pm/V whereas the interferometric measurements yielded a d 33 of 0.45-1.21 ±0.10 pm/V. The difference between these two values highlighted the need to distinguish between Local Piezoelectric Response (LPR) and Global Piezoelectric Response (GPR) and the factors such as crystallinity and sample handling which can affect both. Unlike sputtered films, the results for SS CVD film suggest that the carbon impurities within the film appeared to have an effect in orienting the polarity of the crystallites.

show abstract

“…This technique has been described previously. [13] In our SSCVD depositions of ZnO, we have used zinc carboxylates, [13,14] zinc β-diketonates and zinc oximates [15] as precursors. However, ideal single-source behaviour was only observed with the (carbamato)zinc complex [Zn 4 (µ 4 -O)(O 2 CNEt 2 ) 6 ], [12] as the other precursors required additional oxygen sources to suppress the formation of high-carbon amorphous ZnO.…”

Section: Introductionmentioning

confidence: 99%

Synthesis and Isomerisation Reactions of Tetranuclear and Octanuclear (Carbamato)zinc Complexes

et al. 2008

View full text Add to dashboard Cite

A new series of (diisopropylcarbamato)(oxido)zinc complexes were obtained by innovative synthetic approaches. (2) were synthesised by an identical reaction procedure involving protolysis of ZnEt 2 with iPr 2 NH/ CO 2 and followed by stoichiometric hydrolysis. Recrystallisation of the reaction product from nitrile solvents yielded the tetrazinc complex 1. Conversely, recrystallisation from alkane solvents yielded crystals of the octazinc complex 2. The two structural isomers were readily interconverted simply by recrystallisation from the appropriate solvent. Both complexes were structurally characterised by X-ray crystallogra-

show abstract

X-RAY ABSORPTION SPECTROSCOPY STUDY OF THIN ZnO FILMS GROWN BY SINGLE SOURCE CVD ON Si(100)

Cited by 8 publications

References 0 publications

Self-Texture in the Initial Stages of ZnO Film Growth

Self-Texture in the Initial Stages of ZnO Film Growth

<title>Physiochemical characteristics of piezoelectric zinc oxide films grown by single-source chemical vapor deposition</title>

Synthesis and Isomerisation Reactions of Tetranuclear and Octanuclear (Carbamato)zinc Complexes

Contact Info

Product

Resources

About