We applied high resolution x-ray diffraction techniques to determine the three dimensional domain shape in nominally lattice-matched, CuPt B ordered, In x Ga 1-x P epitaxial layers deposited on GaAs by metal organic vapor phase epitaxy. A technique of reciprocal space mapping is described which provides threedimensional information on the shape and size of the ordered domains. The domain shape is obtained by reciprocal space mapping along orthogonal crystallographic directions. Applying this technique shows that, at large miscut angles, the domains are oriented close to the growth direction, and are elongated by differing extents along the [110] and [ -110].