2000
DOI: 10.1107/s0909049500010359
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X-ray diffraction on Si single crystal with a W-shaped longitudinal groove

Abstract: The measurement of the sagittal deviation of an X-ray beam diffracted on the inclined surface of an Si(111) single crystal was performed on beamline BM5 at the ESRF, with lambda = 0.1 nm and an inclination angle, beta, of 70 degrees . The measured value agrees with the theory developed in previous papers. The topographic picture of the longitudinal edge shows a structure that can be explained in terms of the properties of inclined diffraction.

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Cited by 5 publications
(9 citation statements)
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“…With = 0 the walls of the W-groove should produce homogeneous diffraction spots, while in the real case of T 0 a splitting at the central part of the picture of the groove (owing to the diffraction on the sharp edge region) occurs. From the measured splitting a good coincidence between the experimental ( = 1.096 Â 10 À4 ) and the theoretical ( = 1.07 Â 10 À4 ) values was obtained considering some blur introduced by the ®nite value of the range of the total re¯ection (Artemiev et al, 2000).…”
Section: Introductionsupporting
confidence: 53%
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“…With = 0 the walls of the W-groove should produce homogeneous diffraction spots, while in the real case of T 0 a splitting at the central part of the picture of the groove (owing to the diffraction on the sharp edge region) occurs. From the measured splitting a good coincidence between the experimental ( = 1.096 Â 10 À4 ) and the theoretical ( = 1.07 Â 10 À4 ) values was obtained considering some blur introduced by the ®nite value of the range of the total re¯ection (Artemiev et al, 2000).…”
Section: Introductionsupporting
confidence: 53%
“…A thorough chemical polish etch was applied to remove surface damage and residual strains. The same method as utilized by Artemiev et al (2000) has been used for the measurements of sagittal deviations of the Bragg diffracted beams. The experiment was performed on BM5 at the ESRF for the wavelength !…”
Section: Methodsmentioning
confidence: 99%
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“…First of all, this is related to the shape of the working surfaces of the crystals and the corresponding optical paths of the geometrical rays through the optical system. Also, for the parallel arrangement the smearing effect accompanying inclined Bragg diffraction (Artemiev et al, 2000) is increased by a factor which is equal to the number of re¯ections, while in the case of an antiparallel (dispersive) arrangement this effect is practically cancelled out, or is at least less noticeable. Despite the fact that the intensity distribution in the case of the parallel arrangement of the crystals is broader, the peak intensity is 17% higher than in the case of the antiparallel arrangement.…”
Section: Resultsmentioning
confidence: 99%
“…According to this simpli®ed solution, the sagittal deviation of a ray diffracted on an inclined surface is proportional to the tangent of the inclination angle , nm] for Si (Hrdy Â, 1998). The validity of this simple formula has been experimentally checked and its limitation has been determined from exact calculations (Artemiev et al, 2000).…”
Section: Resultsmentioning
confidence: 99%