X-ray Emission From Thin Films on a Substrate - Experiments and Simulation

Yuan, Yu; Demers, Hendrix; Brodusch, Nicolas; Gauvin, Raynald

doi:10.1017/s1431927616002853

Cited by 4 publications

(4 citation statements)

References 3 publications

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“…Moreover, one can obtain the X-ray distribution in three-dimensional (3D) space for both characteristic and bremsstrahlung X-rays. However, one drawback of MC X-ray is the lack of the modeling of secondary fluorescence (SF), which has limited its application in some cases (Yuan et al, 2016).…”

Section: Introductionmentioning

confidence: 99%

Secondary Fluorescence of 3D Heterogeneous Materials Using a Hybrid Model

Yuan

Demers²,

Wang

et al. 2020

Microsc Microanal

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In electron probe microanalysis or scanning electron microscopy, the Monte Carlo method is widely used for modeling electron transport within specimens and calculating X-ray spectra. For an accurate simulation, the calculation of secondary fluorescence (SF) is necessary, especially for samples with complex geometries. In this study, we developed a program, using a hybrid model that combines the Monte Carlo simulation with an analytical model, to perform SF correction for three-dimensional (3D) heterogeneous materials. The Monte Carlo simulation is performed using MC X-ray, a Monte Carlo program, to obtain the 3D primary X-ray distribution, which becomes the input of the analytical model. The voxel-based calculation of MC X-ray enables the model to be applicable to arbitrary samples. We demonstrate the derivation of the analytical model in detail and present the 3D X-ray distributions for both primary and secondary fluorescence to illustrate the capability of our program. Examples for non-diffusion couples and spherical inclusions inside matrices are shown. The results of our program are compared with experimental data from references and with results from other Monte Carlo codes. They are found to be in good agreement.

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Section: Introductionmentioning

confidence: 99%

Secondary Fluorescence of 3D Heterogeneous Materials Using a Hybrid Model

Yuan

Demers²,

Wang

et al. 2020

Microsc Microanal

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“…Secondary fluorescence X-rays are emitted by X-rays instead of electrons and normally in small magnitudes for bulk materials (Goldstein et al, 2003). But for materials with complex geometries, like multilayer materials, couples, and particles, the contribution of secondary fluorescence can be significant (Pfeiffer et al, 1996; Yuan et al, 2016). This is because the range of X-ray-emitted secondary fluorescence far exceeds the primary X-ray range as X-rays have a larger mean free path than electrons.…”

Section: Introductionmentioning

confidence: 99%

Secondary Fluorescence Correction for Characteristic and Bremsstrahlung X-Rays Using Monte Carlo X-ray Depth Distributions Applied to Bulk and Multilayer Materials

et al. 2019

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Secondary fluorescence effects are important sources of characteristic X-ray emissions, especially for materials with complicated geometries. Currently, three approaches are used to calculate fluorescence X-ray intensities. One is using Monte Carlo simulations, which are accurate but have drawbacks such as long computation times. The second one is to use analytical models, which are computationally efficient, but limited to specific geometries. The last approach is a hybrid model, which combines Monte Carlo simulations and analytical calculations. In this article, a program is developed by combining Monte Carlo simulations for X-ray depth distributions and an analytical model to calculate the secondary fluorescence. The X-ray depth distribution curves of both the characteristic and bremsstrahlung X-rays obtained from Monte Carlo program MC X-ray allow us to quickly calculate the total fluorescence X-ray intensities. The fluorescence correction program can be applied to both bulk and multilayer materials. Examples for both cases are shown. Simulated results of our program are compared with both experimental data from the literature and simulation data from PENEPMA and DTSA-II. The practical application of the hybrid model is presented by comparing with the complete Monte Carlo program.

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“…However, its contribution can be significant in some cases like thin film on a substrate [1,2]. A program was developed for both characteristic and bremsstrahlung x-ray fluorescence correction based on MC xray, a Monte Carlo simulation software [3].…”

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confidence: 99%

“…In the procedure of quantitative x-ray microanalysis, the effect of x-ray fluorescence on the emitted xray intensities is usually ignored because of its tiny magnitude, i.e., for large homogenous sample. However, its contribution can be significant in some cases like thin film on a substrate [1,2]. A program was developed for both characteristic and bremsstrahlung x-ray fluorescence correction based on MC xray, a Monte Carlo simulation software [3].…”

mentioning

confidence: 99%