1998
DOI: 10.1063/1.120708
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X-ray generation in cryogenic targets irradiated by 1 μm pulse laser

Abstract: Soft x-ray spectral radiations from Xe, H2O, and CO2 cryogenic targets irradiated by a 1 μm neodymium doped YAG-slab laser at pulse widths of 12–20 ns and at laser intensities of 5×1010–1012 W/cm2 have been observed. These targets radiate soft x-rays in a wavelength range of 10–13 nm which is useful for projection microlithography. We have found a strong x-ray spectral peak at λ=10.8 nm with a Xe cryogenic target. The measured x-ray conversion efficiency with the Xe target was 0.8%/sr(λ=10.8±0.27 nm) at a lase… Show more

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Cited by 35 publications
(10 citation statements)
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“…X-ray conversion efficiency was measured for a cryogenic Xe target irradiated by a YAG laser pulse of '-'1Ons duration.37 Supposing the use of a multilayer mirror, the X-ray conversion efficiency into a limited bandwidth was evaluated in Ref. 37. The conversion efficiency into the bandwidth of nm at 10.8 nm was estimated to be 0.8 %/sr.…”
Section: Resultsmentioning
confidence: 99%
“…X-ray conversion efficiency was measured for a cryogenic Xe target irradiated by a YAG laser pulse of '-'1Ons duration.37 Supposing the use of a multilayer mirror, the X-ray conversion efficiency into a limited bandwidth was evaluated in Ref. 37. The conversion efficiency into the bandwidth of nm at 10.8 nm was estimated to be 0.8 %/sr.…”
Section: Resultsmentioning
confidence: 99%
“…Assuming an isotropic plasma emission, a conversion efficiency of 0.5% of the laser energy (4π sr, bandwidth 4% FWHM @ 13nm) for the Xe target and 0.1% for O 2 (bandwidth 0.5%) is obtained. As compared to results of other groups [19][20][21], and considering the narrow bandwidth especially for O 2 these data represent rather high efficiencies. In order to increase the soft X-ray intensity, the relationship between the laser energy and the EUV yield was investigated for the Xe target (single solenoid valve).…”
Section: Intensity Measurementsmentioning
confidence: 88%
“…[3][4][5] A technologically very important wavelength range for the near future is the region near 13.5 nm. 3 Beyond xenon plasma pinch radiation sources with relatively high-energy conversion efficiency, 6 liquid microjet 7,8 or gaseous cluster beam [9][10][11][12] targets are attractive alternatives. Liquid water jet or water droplet target laser-plasma sources ͑12.99 nm͒ [13][14][15] and liquid/solid microjets 4,8 or clusters 11,12 of xenon are promising approaches.…”
Section: Introductionmentioning
confidence: 99%