2019
DOI: 10.6028/jres.124.003
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X-ray Metrology for the SemiconductorIndustry Tutorial

Abstract: The semiconductor industry is in need of new, in-line dimensional metrology methods with higherspatial resolution for characterizing their next generation nanodevices. The purpose of this short course is to train the semiconductor industry on the NIST-developed critical dimension small angle X-ray scattering (CDSAXS) method. The topics will include both data processing and instrumentation. The short course will also provide an oppo… Show more

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(2 citation statements)
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“…Video tutorials from the short course are available online and have been widely viewed. 33 3 Prospects for CDSAXS…”
Section: X-ray Reflectivity As a Cdsaxs Toolmentioning
confidence: 99%
See 1 more Smart Citation
“…Video tutorials from the short course are available online and have been widely viewed. 33 3 Prospects for CDSAXS…”
Section: X-ray Reflectivity As a Cdsaxs Toolmentioning
confidence: 99%
“…In 2016, NIST hosted a widely attended short course on CDSAXS covering instrumentation, measurements, and data fitting. Video tutorials from the short course are available online and have been widely viewed 33 …”
Section: Nist Milestones In Cdsaxs Developmentmentioning
confidence: 99%