2009
DOI: 10.1016/j.tsf.2009.03.100
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X-ray photoelectron spectroscopy analyses of titanium oxynitride films prepared by magnetron sputtering using air/Ar mixtures

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Cited by 76 publications
(49 citation statements)
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“…39,40 Figure 3 shows the XPS results from a TiÀPd sample that was anodized in a formamide-based electrolyte containing 0.2 M NH 4 F, 0.1 M H 3 PO 4 , and 3 vol % H 2 O at 20 V for 24 h. Figure 3a shows Ti 2p spectra where two peaks were obtained, which correspond to Ti 2p 3/2 and Ti 2p 1/2 photoemission spectra. The O 1s peak (Figure 3b) consists of a symmetric singlet at ∼530.4 eV, characteristic of lattice oxygen for metal oxides.…”
Section: Resultsmentioning
confidence: 99%
“…39,40 Figure 3 shows the XPS results from a TiÀPd sample that was anodized in a formamide-based electrolyte containing 0.2 M NH 4 F, 0.1 M H 3 PO 4 , and 3 vol % H 2 O at 20 V for 24 h. Figure 3a shows Ti 2p spectra where two peaks were obtained, which correspond to Ti 2p 3/2 and Ti 2p 1/2 photoemission spectra. The O 1s peak (Figure 3b) consists of a symmetric singlet at ∼530.4 eV, characteristic of lattice oxygen for metal oxides.…”
Section: Resultsmentioning
confidence: 99%
“…The O 1s region shows peaks near 529.9 eV and 531.3 eV. [24,25,28,29] XPS data for the Cu 2p and Ti 2p regions are shown in the Supporting Information (Supporting Information, Figure S7), and they confirm the presence of Cu 2+ and Ti 4+ . A small abovebaseline contribution near 534 eV is attributed to chemisorbed oxygen, perhaps from residual oxidized hydrocarbons.…”
mentioning
confidence: 76%
“…[27,28] The N 1s region is much noisier, but the shape of the above-baseline signal is more consistent with a contribution from two peaks rather than one. The O 1s region shows peaks near 529.9 eV and 531.3 eV.…”
mentioning
confidence: 88%
“…After one cycle of laser treatment, the intensity of this chemical state is reduced, while a prominent structure around 396.5 eV is formed. This feature can be fitted assuming two chemical states at 396.9 and 396.1 eV, which are attributed to TiN and TiN x O y by comparing the results to oxidation experiments of TiN [16] or XPS investigations of titanium oxynitride films [17,19]. In contrast, after five laser cycles, nitrogen is mainly absent and a stable titanium oxide surface has formed.…”
Section: Materials Propertiesmentioning
confidence: 99%