X-ray Photoelectron Spectroscopy Depth Profiling of La₂O₃/Si Thin Films Deposited by Reactive Magnetron Sputtering

Abstract

The La(2)O(3)/Si thin films have been deposited by reactive DC magnetron sputtering. Amorphous state of La(2)O(3) layer has been shown by RHEED observation. Top surface chemistry of the a-La(2)O(3) has been evaluated with layer-by-layer depth profiling by ion bombardment and XPS measurements. It was found by core level spectroscopy that the top surface of the a-La(2)O(3) film consists of hydrocarbon admixture, lanthanum carbonate, and hydroxides that formed as a result of contact with air atmosphere. Thickness of this top surface modified layer is below 1 nm for a contact time of ~1.5 h with air at normal conditions.

X-ray induced color change on dense yttria samples obtained by spark plasma sintering

“…Y 3d5/2 and Y 3d3/2, occurs at binding energy of 156.9 and 159.2 eV, whereas the O 1s line occurred at 529.5 eV. These values exhibit a good agreement with literature ones [35,38,39].…”

“…Prior any experimental measurement, powders were compacted into relatively thin pellets by cold pressing under Ar atmosphere. The depth profiling of Y 2 O 3 samples was performed by alternating Ar + ion sputtering and bombardment with XPS data acquisition and analysis [34][35][36]. Energy of Ar + ions, current density, and angle of sputtering-induced erosion were set equal to 1.05 keV, 4-5 A cm −2 , and 45 • respectively.…”

Structure, chemistry and luminescence properties of dielectric La Hf1-O films

“…The spineorbit splitting between La3d 5/2 and La3d 3/2 is approximately 16.9 eV. In our experiments, the charging effect was corrected by setting the La3d 5/2 peak at 833.35 eV [18]. According to the literature [18e22], the main peak La3d 5/2 for bulk La 2 O 3 is located between 833.2 and 834.0 eV.…”

Effects of rare earth oxide additive on surface and tribological properties of polyimide composites

“…however, a small La3d peak was observed at 834 eV in La-PI-Cs thin film [57][58][59][60][61]. The La3d peak was relatively strong in the high resolution spectrum (the inset in Fig.…”

“…5b) and La-PI-Cs film (Fig. 5c) [57][58][59][60][61]. However, on the surface of La-PI-Cs film, all these peaks became much weaker, and the peak of O=C-N at 287.6 eV almost disappeared (Fig.…”