1999
DOI: 10.1016/s0009-2614(99)01233-6
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X-ray photoelectron spectroscopy of surface-treated indium-tin oxide thin films

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Cited by 162 publications
(93 citation statements)
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“…Particularly, the oxygen plasma yields the highest surface energy (66.3 mJ/m 2 ) and the highest surface polarity (0.56), mainly due to the significantly enhanced polar component γ p S (from 8.2 to 36.4 mJ/m 2 ). We propose that the increase of the surface energy and polarity is due to several reasons [28][29][30]. One reason is the improvement of the surface stoichiometry, since oxygen plasma treatment introduces oxygen and increases the oxygen content, and meanwhile effectively removes the hydrocarbon contaminant from the ITO surface to reduce the carbon content.…”
Section: Devices Fabricationmentioning
confidence: 99%
“…Particularly, the oxygen plasma yields the highest surface energy (66.3 mJ/m 2 ) and the highest surface polarity (0.56), mainly due to the significantly enhanced polar component γ p S (from 8.2 to 36.4 mJ/m 2 ). We propose that the increase of the surface energy and polarity is due to several reasons [28][29][30]. One reason is the improvement of the surface stoichiometry, since oxygen plasma treatment introduces oxygen and increases the oxygen content, and meanwhile effectively removes the hydrocarbon contaminant from the ITO surface to reduce the carbon content.…”
Section: Devices Fabricationmentioning
confidence: 99%
“…In addition to the removal of hydrocarbon contaminant from the surface, oxide bonds can form on the substrate surface during oxygen plasma treatment, which leads the surface to be more hydrophilic and shows higher sur- face free energy. Another is that the molecular water monolayer chemisorbed exists on the ITO surface for the oxygen plasma treatment [40]. And it is the presence of monolayer adsorbate coverage of water that increases the water concentration.…”
Section: The Effect Of Oxygen Plasma Treatment On the Surface Propertmentioning
confidence: 99%
“…The observed peaks can be divided into three peaks O I , O II , and O III located at 530.2, 531.5, and 532.5 eV, respectively. The O I peak is assigned to In 2 O 3 lattice oxygen [22,23], while the O II peak is assigned to the oxygen ions in the oxygen vacancy regions [22,23]. For the O III peak, it can originate from the H 2 O absorbed on the surfaces of samples [23].…”
Section: Introductionmentioning
confidence: 99%