2007
DOI: 10.1063/1.2717091
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X-ray photoemission study of CoFeB∕MgO thin film bilayers

Abstract: We present results from an X-ray photoemission spectroscopy (XPS) study of CoFeB/MgO bilayers where we observe process-dependent formation of B, Fe, and Co oxides at the CoFeB/MgO interface due to oxidation of CoFeB during MgO deposition. Vacuum annealing reduces the Co and Fe oxides but further incorporates B into the MgO forming a composite MgB x O y layer. Inserting an Mg layer between CoFeB and MgO introduces an oxygen sink, providing increased control over B content in the barrier.

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Cited by 93 publications
(79 citation statements)
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“…4 as a function of sput- Further analyzing the peak position in Fig. 3͑a͒, we can find that the position of B oxide between 22 and 24 min sputtering time is almost constant and shifted by about 1 eV to higher BE compared with the B oxide position in the reference sample, which agrees with the results of Read et al 7 The higher BE means that the B in MgO is in a higher oxidation state, closer to B 3+ , than B of the boron oxide in the oxidized CoFeB layer ͑BO x ͒. This B 1s position in MgO also agrees with the value measured by Ong et al 19 on B 2 O 3 ͑Ϫ193.6 eV with respect to the Fermi level͒.…”
Section: B Boron Distribution In the Mgo Barriersupporting
confidence: 81%
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“…4 as a function of sput- Further analyzing the peak position in Fig. 3͑a͒, we can find that the position of B oxide between 22 and 24 min sputtering time is almost constant and shifted by about 1 eV to higher BE compared with the B oxide position in the reference sample, which agrees with the results of Read et al 7 The higher BE means that the B in MgO is in a higher oxidation state, closer to B 3+ , than B of the boron oxide in the oxidized CoFeB layer ͑BO x ͒. This B 1s position in MgO also agrees with the value measured by Ong et al 19 on B 2 O 3 ͑Ϫ193.6 eV with respect to the Fermi level͒.…”
Section: B Boron Distribution In the Mgo Barriersupporting
confidence: 81%
“…It leads to two possibilities: ͑i͒ B could be in a substitutional position, occupying the Mg vacancies to form a ͑MgO͒ x ͑B 2 O 3 ͒ y compound 11 or ͑ii͒ it could be in the amorphous form of B 2 O 3 localized in the MgO grain boundaries. The large concentration of B distributed in our MgO layer after annealing agrees both with the claims of Read et al 7 that an intermediate oxide Mg x B y O could form after the annealing procedure and with the recent study of boron distribution by Cha et al by using EELS. 11 However, to end up this discussion, further experiments are required.…”
Section: B Defects In the Mgo Barriersupporting
confidence: 80%
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“…In our experiment, during an annealing process the B atoms from CoFeB electrode can diffuse into the MgO barrier 15 ͑which is not the case in pure Fe electrodes used in experiment in Refs. 5 and 6͒, which can result in other exchange mechanisms.…”
Section: B Iecmentioning
confidence: 99%