2009
DOI: 10.1007/s11661-009-9910-5
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X-Ray Scattering Studies of the Surface Structure of Complex Oxide Films during Layer-by-Layer Growth via Pulsed Laser Deposition

Abstract: We report time-resolved X-ray reflectivity and surface diffuse X-ray scattering measurements of the surface evolution during pulsed laser deposition of SrTiO 3 thin films. After developing the scattering theory, we illustrate how these data may used to characterize the kinetics of interlayer transport and of the island size distribution during deposition. We then calculate the densitydensity correlation function in real space and show that it exhibits the expected features.

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Cited by 10 publications
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“…Figure 5 shows the scattering geometry, including the scattered intensities collected by an area detector and a slice of the background-subtracted data along the in-plane momentum transfer (q || ) direction (inset). The scattered intensity can be divided into two components: specular (at q || = 0) and diffuse (at q || ≠ 0) (43)(44)(45). The diffuse intensity originates from the presence of islands on the surface, with a profile that depends on the island distribution.…”
Section: Resultsmentioning
confidence: 99%
“…Figure 5 shows the scattering geometry, including the scattered intensities collected by an area detector and a slice of the background-subtracted data along the in-plane momentum transfer (q || ) direction (inset). The scattered intensity can be divided into two components: specular (at q || = 0) and diffuse (at q || ≠ 0) (43)(44)(45). The diffuse intensity originates from the presence of islands on the surface, with a profile that depends on the island distribution.…”
Section: Resultsmentioning
confidence: 99%
“…Performing the experiments directly under high vacuum conditions ensures that effects such as degradation of the structure or incorporation of impurities due to the exposure to ambient conditions are excluded. Furthermore, transient effects can only be identified if the growth is followed directly in real time (Banerjee et al, 2013;Bommel et al, 2014;Kowarik et al, 2006;Heinemeyer et al, 2010;Krause et al, 2004;Liscio et al, 2013;Kowarik et al, 2008;Brock et al, 2010). Films with three different mixing ratios were prepared.…”
Section: Introductionmentioning
confidence: 99%
“…[ 234 ] In situ growth studies of metals and semiconductors using CTR scattering have a long history since the first measurements of Ge homoepitaxy via MBE by Vlieg et al [ 235 ] Homo‐ and heteroepitaxial MBE growth, [ 236–240 ] as well as metal‐organic vapor phase epitaxy (MOVPE) growth, [ 241–244 ] have been observed, leading to important basic insights into layer formation and morphology. Growth facilities built at synchrotron beamlines have enabled similar studies of complex oxide growth by MOVPE, [ 245,246 ] PLD, [ 247–250 ] and more recently, MBE, [ 232,251–253 ] revealing, for example, the tendency for certain layered structures to re‐arrange during growth [ 233,254 ] and the conditions under which oxygen defect structures are stabilized [ 100,255 ] (see Figure ). In addition to growth, in situ CTR measurements in heterogeneous environments have been carried out on crystalline‐gas [ 256 ] and crystalline‐liquid interfaces, [ 257–272 ] often relevant for geological and mineralogical studies.…”
Section: Resultsmentioning
confidence: 99%