X-Ray Scattering Study of the Surface Morphology of Au(111) during<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mrow><mml:msup><mml:mrow><mml:mi>Ar</mml:mi></mml:mrow><mml:mrow><mml:mo>+</mml:mo></mml:mrow></mml:msup></mml:mrow></mml:math>Ion Irradiation

Murty, M. V. R. K.; Curcic, T.; Judy, A.; Cooper, B. H.; Woll, Arthur R.; Brock, J. D.; Kycia, S.; Headrick, Randall L.

doi:10.1103/physrevlett.80.4713

Cited by 108 publications

(53 citation statements)

References 30 publications

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“…We have made the first real-time measurement of the time-dependence of the characteristic spacing between these features. X-ray studies indicate the feature spacing follows a power law in time with an exponent of 0.27 [4]. This exponent is consistent with the existence of barriers for interlayer transport of adatoms and/or vacancies in excess of the barriers for single layer diffusion.…”

Section: ) Objectivessupporting

confidence: 68%

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Fundamentals of Metal Film Deposition With Hyperthermal Ions

Cooper¹

2000

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Public reporting burden for this collection of information is estimated to average 1 hour per response, including tr gathering and maintaining the data needed, and completing and reviewing the collection of information. Send co collection of information, including suggestions for reducing this burden, to Washington Headquarters Services, C Davis Highway, Suite 1204, Arlington, VA 22202-4302, and to the Office of Management and Budget, Paperwork 03J^ AGENCY USE ONLY (Leave blank) REPORT DATE 3. REPORT TYPE AND DATES COVEREDFinal -15 December 1996 -14 December 2000 TITLE AND SUBTITLE Fundamentals of Metal Film Deposition with Hyperthermal Ions AUTHOR(S)Dr. Barbara H. Cooper PERFORMING ORGANIZATION NAME(S) AND ADDRESS(ES)Cornell University Ithaca, NY 14853 14 December 00 can be summarized in five key areas. They are: SPONSORING/MONITORING AGENCY NAWIE(S) AND ADDRESS(ES)AFOSR ABSTRACT (Maximum 200 words)Our accomplishments for the period of 15 December 97 A. Morphology evolution of ion-irradiated Au(lll); B. Thermal relaxation of a sputter-roughened surface; C. Energetic deposition of Cu on Cu(l 11); D. Monte Carlo and Molecular Dynamics simulations of mound formation, thermal relaxation, and energetic deposition; and E. Hardware development for studies of energetic deposition with controlled energy beams. PROJECT TITLE: FUNDAMENTALS OF METAL THIN FILM DEPOSITION AND SURFACE PROCESSING WITH HYPERTHERMAL IONS 1) OBJECTIVESOur objectives are to understand the microscopic processes that occur during thin film growth and surface processing with energetic beams, and to determine how and why the use of energetic beams influences macroscopic film and surface properties. Technologically important growth techniques (e.g., sputter and plasma deposition, ionassisted deposition, pulsed laser deposition) employ hyperthermal energy (a few eV to several hundred eV) particles, resulting in lower growth temperatures and films with substantially different properties than thermally deposited films [1]. These differences result in part from the highly non-equilibrium atomic motions that can occur when energy is transferred to the surface atoms by the collisions of the hyperthermal incident particles [2]. In addition, the hyperthermal beams used routinely in surface processing techniques, such as sputter cleaning, patterning, and depth profiling, can give rise to a variety of surface morphologies [3]. It is thus desirable to gain a better understanding of the microscopic processes that occur during energetic beam thin film growth and surface processing and how they influence surface properties.We are using the complementary techniques of real-time X-ray diffraction and Scanning Tunneling Microscopy (STM) to study surface morphology evolution during growth and sputtering with energetic beams. The combined use of X-rays and STM provides a more complete picture than either technique alone. X-rays measure the long range and average properties of the surface, and are ideally suited to real-time observations. STM provides real-space measurem...

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Section: ) Objectivessupporting

confidence: 68%

“…The spacing ranges in magnitude from approximately 10 to 50 nm. These results are reported and discussed elsewhere [4,9]. (The X-ray work was supported jointly by this grant and by the Cornell Center for Materials Research.…”

Section: Significance and Relevancesupporting

confidence: 63%

Fundamentals of Metal Film Deposition With Hyperthermal Ions

Cooper¹

2000

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“…The periodicity does not show a significant energy dependence and increases from 8.3 ± 0.3 nm to a maximum of 16.9 ± 0.4 nm, showing a power-law dependence on the ion fluence with a coarsening exponent of 0.26 ± 0.01. The same scaling with a time factor of 0.27 ± 0.02 was obtained by Ramana Murty et al [77]. The authors studied the surface morphology of Au{111} during sputtering with 500 eV Ar + ions incident at 45 • by real-time X-ray scattering.…”

Section: Au {111} Surface Modificationmentioning

confidence: 65%

“…The pattern orientation along a specific crystallographic direction can be explained by considering its formation as a result of the suppression of interlayer diffusion by the step edge or Ehrlich-Schwoebel barrier [77,79,[83][84][85][86][87]. The activation energy for vacancy diffusion on Au{111} is much higher than the one for adatoms [88], hence we can suppose that at room temperature adatoms are dominantly responsible for the pattern formation.…”

Section: Au {111} Surface Modificationmentioning

confidence: 99%

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Material characterization and modification using helium lon microscopy : various examples

Veligura

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On the Role of Oxygen in Stabilizing Low‐Coordinated Au Atoms

Biener¹,

Biener²,

Nowitzki³

et al. 2006

ChemPhysChem

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Low‐coordinated gold atoms play a decisive role in the catalytic cycle of low‐temperature CO oxidation or the selective oxidation of olefins. A comparative study of argon and oxygen ion‐bombarded Au(111) surfaces (see microstructure images) reveals a threefold role of adsorbed oxygen: structure formation, stabilization of low‐coordinated gold atoms, and transfer during oxidation reactions.

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X-Ray Scattering Study of the Surface Morphology of Au(111) duringAr+Ion Irradiation

Cited by 108 publications

References 30 publications

Fundamentals of Metal Film Deposition With Hyperthermal Ions

Fundamentals of Metal Film Deposition With Hyperthermal Ions

Material characterization and modification using helium lon microscopy : various examples

On the Role of Oxygen in Stabilizing Low‐Coordinated Au Atoms

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