2013
DOI: 10.1063/1.4809978
|View full text |Cite
|
Sign up to set email alerts
|

X-ray spectroscopic study of SrTiOx films with different interlayers

Abstract: Air-exposed systems SrTiOx/B/Si with different film thickness (7 nm and 15 nm) and different interlayers (ILs) (B: SiO2, Si3N4, and HfO2) grown by the atomic layer deposition (ALD) technique were studied using near edge x-ray absorption fine structure (NEXAFS), soft x-ray photoelectron spectroscopy (XPS), and hard x-ray photoelectron spectroscopy (HAXPES). It was established that the material of the IL influences strongly the lowest unoccupied bands and local atomic structure of the SrTiO3 film. In the case of… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

0
14
0

Year Published

2013
2013
2022
2022

Publication Types

Select...
9

Relationship

1
8

Authors

Journals

citations
Cited by 15 publications
(14 citation statements)
references
References 69 publications
0
14
0
Order By: Relevance
“…This effect is well known in case of Ti 2p-absorption spectra of TiO2 and more expressed in the shape of feature b connected with the double-degenerate eg component [23,[30][31][32][33][34][35].…”
Section: Titanium 2p X-ray Absorptionmentioning
confidence: 77%
“…This effect is well known in case of Ti 2p-absorption spectra of TiO2 and more expressed in the shape of feature b connected with the double-degenerate eg component [23,[30][31][32][33][34][35].…”
Section: Titanium 2p X-ray Absorptionmentioning
confidence: 77%
“…Keeping in mind that the O K-absorption spectrum of TiO 2 originates mainly from O 1s-to-valence transitions, the covalent bonding of the Ti 3d with the O 2p states gives rise to the unoccupied valence t 2g and e g orbitals in the octahedral field. Then it is plausible to conclude that the features a and b in the measured O K-absorption spectrum of the TiN are related to the Ti 3d states mixed with O 2p states 50 . In its turn, the second wide band c-d can be attributed to the O2p states mixed with Ti 4sp bands 60 .…”
Section: Resultsmentioning
confidence: 98%
“…It has been established in [24][25][26] that inserting a thin buffer layer between the substrate and dielectric film affects the self-organization and the properties of the active layer. Taking into account a high concentration of oxygen vacancies in transparent conductive oxide (TCO) films, one can assume that TCO layers in the metal/TiO 2 /TCO/metal assembly will be an additional source of oxygen vacancies for the TiO 2 film.…”
Section: Introductionmentioning
confidence: 99%