Expansion of a hemispherical shell by inner pressure has been widely applied for the model of the deformation by an indentation on a flat surface; however, the deformed region is not necessarily spherically symmetric, especially in anisotropic materials such as single crystals. Therefore, whether the spherical model is applicable in an indentation process for objective materials must always be kept in mind. Indentations have been made on the (111) surface of silicon single crystal at various temperatures. The three-dimensional shape of the plastically deformed region was experimentally measured by means of an etching technique and its difference from the hemisphere was observed. It was never spherical but much more complicated, similar to a bottle gourd. The slip mechanism, which resulted in the observed shape of the plastic region, is discussed further. The plastic region was analytically obtained also on the assumption that the stress distribution was spherically symmetrical. The result is approximately in accordance with the observed shape. It is therefore concluded that the stress distribution is nearly spherical although the plastic region is far from it. The yield strength of silicon crystals and their temperature dependence were obtained based on the spherical model.