Xenon Plasma Focused Ion Beam Milling for Obtaining Soft X-ray Transparent Samples

Mayr, Sina; Finizio, Simone; Reuteler, Joakim; Stutz, S.; Dubs, Carsten; Weigand, Markus; Hrabec, Aleš; Raabe, Jörg; Wintz, Sebastian

doi:10.3390/cryst11050546

Cited by 3 publications

(3 citation statements)

References 23 publications

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“…The structural integrity of a free-standing crystalline membrane during KOH etching is still to be investigated. An alternative to KOH etching would be FIB milling [ 38 ] or RIE [ 39 ].…”

Section: Discussionmentioning

confidence: 99%

TEM sample preparation of lithographically patterned permalloy nanostructures on silicon nitride membranes

Williams,

Faley,

Vas

et al. 2024

Beilstein J. Nanotechnol.

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We have prepared ferromagnetic nanostructures intended for the investigation of high-frequency magnetization dynamics in permalloy (Py) nanodisks using Lorentz transmission electron microscopy (LTEM) and electron holography. Py nanodisks were fabricated on thin silicon nitride (SiN) membranes using three different fabrication methods: lift-off, ion beam etching (IBE), and stencil lithography. They were further analyzed using different instruments, including scanning electron microscopy, LTEM, and electron holography. A bilayer of positive PMMA resist was utilized in the first fabrication method to form an undercut structure that guarantees a clean lift-off procedure. The second approach used dry etching with an Ar beam to etch a thin Py film, while an electron-beam-patterned negative resist mask kept the desired structure. In the third process, nanostencils (shadow masks) with submicrometer apertures were milled on SiN membranes using a focused ion beam. Furthermore, we have developed a new TEM sample preparation method, where we fabricated Py nanostructures on a bulk substrate with a SiN buffer layer and etched the substrate to create a thin SiN membrane under the Py nanostructure. Finally, we observed the vortex dynamics of the Py nanodisk under magnetic fields using LTEM and off-axis electron holography. A correlation between preparation methods and the properties of the Py nanostructures was made.

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“…The structural integrity of a free-standing crystalline membrane during KOH etching is still to be investigated. An alternative to KOH etching would be FIB milling [ 38 ] or RIE [ 39 ].…”

Section: Discussionmentioning

confidence: 99%

TEM sample preparation of lithographically patterned permalloy nanostructures on silicon nitride membranes

Williams,

Faley,

Vas

et al. 2024

Beilstein J. Nanotechnol.

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show abstract

“…However, recent developments in focused-ion-beam lithography enabled the fabrication of thin (<100 nm) membranes from single-crystalline substrates such as SrTiO 3 and Gd 3 Ga 5 O 12 , opening the possibility to study epitaxial materials, e.g. multiferroic perovskites, magnetic garnets) with transmission x-ray microscopy (TXM) techniques [305].…”

Section: Current and Future Use Of The Technique For Materials Sciencementioning

confidence: 99%

“…The atomic selectivity in resonant imaging is an additional asset to understand how dynamics relates to function in these compounds. Many of these systems are grown epitaxially on single-crystalline substrates, and we note that significant progress has been made in locally thinning such samples to soft x-ray transparency [305,363].…”

Section: Current and Future Use Of The Technique For Materials Sciencementioning

confidence: 99%

2024 roadmap on magnetic microscopy techniques and their applications in materials science

Christensen,

Staub,

Devidas

et al. 2024

J. Phys. Mater.

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Considering the growing interest in magnetic materials for unconventional computing, data storage, and sensor applications, there is active research not only on material synthesis but also characterisation of their properties. In addition to structural and integral magnetic characterisations, imaging of magnetization patterns, current distributions and magnetic fields at nano- and microscale is of major importance to understand the material responses and qualify them for specific applications. In this roadmap, we aim to cover a broad portfolio of techniques to perform nano- and microscale magnetic imaging using SQUIDs, spin center and Hall effect magnetometries, scanning probe microscopies, x-ray- and electron-based methods as well as magnetooptics and nanoMRI. The roadmap is aimed as a single access point of information for experts in the field as well as the young generation of students outlining prospects of the development of magnetic imaging technologies for the upcoming decade with a focus on physics, materials science, and chemistry of planar, 3D and geometrically curved objects of different material classes including 2D materials, complex oxides, semi-metals, multiferroics, skyrmions, antiferromagnets, frustrated magnets, magnetic molecules/nanoparticles, ionic conductors, superconductors, spintronic and spinorbitronic materials.

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Large Area Survey Grain Size and Texture Optimization For Thin Film CdTe Solar Cells Using Xenon-Plasma Focused Ion Beam (PFIB)

Kornienko

Oklobia

Irvine

et al. 2022

2022 IEEE 49th Photovoltaics Specialists Conference (PVSC)

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Xenon Plasma Focused Ion Beam Milling for Obtaining Soft X-ray Transparent Samples

Cited by 3 publications

References 23 publications

TEM sample preparation of lithographically patterned permalloy nanostructures on silicon nitride membranes

TEM sample preparation of lithographically patterned permalloy nanostructures on silicon nitride membranes

2024 roadmap on magnetic microscopy techniques and their applications in materials science

Large Area Survey Grain Size and Texture Optimization For Thin Film CdTe Solar Cells Using Xenon-Plasma Focused Ion Beam (PFIB)

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