XPS analysis of laser transmission micro-joint between poly (vinylidene fluoride) and titanium

Sultana, Taslema; Georgiev, Grigor L.; Auner, Gregory W.; Newaz, Golam; Herfurth, Hans; Patwa, Rahul

doi:10.1016/j.apsusc.2008.07.149

Cited by 106 publications

(49 citation statements)

References 12 publications

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“…17 It is difficult to completely resolve the chemical shifts in the Ti2p spectrum due to the overlap of several types of Ti compounds including TiO 2 , TiN, and TiFx. 17,19,20 The presence of the latter is however strongly supported by the observed F1s spectrum as discussed above.…”

Section: Resultssupporting

confidence: 63%

Characterization of Patterned Porous Low-kDielectrics: Surface Sealing and Residue Removal by Wet Processing/Cleaning

Le¹,

Kesters²,

Decoster³

et al. 2016

ECS J. Solid State Sci. Technol.

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The results described in this paper first demonstrate key differences between a plasma-exposed blanket porous dielectric sample and a patterned structure in terms of surface sealing induced by the patterning plasma using ellipsometric porosimetry characterization. While the blanket CVD organosilicate glass (nominal k-value = 2.4, ∼20% of porosity) surface was sealed by the C 4 F 8 /CF 4 -based plasma, the surface of the analogous patterned structure of 45 nm 1/2 pitch was found to be completely open after the same patterning plasma process. Second, the surface composition of the patterned feature, type of the residues generated during the plasma etch, and the effect of a subsequent wet clean step are presented. The experimental results demonstrate that the use of a relevant patterned test structure and its characterization represent an appropriate approach for the optimization of the etch and cleaning processes. The removal efficiency of various wet clean solutions, including dilute HF, citric acid, tetramethylammonium hydroxide:H 2 O 2 :H 2 O mixture, and a slightly alkaline formulated mixture, with regard to polymer residues, CFx, and metal-containing residues, TiFx, can be clearly distinguished using the patterned porous low-k stack. In back-end of line (BEOL) processing of advanced microelectronic CMOS integrated circuits, conductor lines are made using a damascene approach. For this, dielectric layers are locally etched through a patterned photoresist or metal hardmask layer using plasmas and followed by electroplating of Cu inside the etched patterns. In order to ensure accurate profile control, etching anisotropy, and minimize degradation of the exposed porous dielectric during the plasma etch, polymerizing plasma chemistries are employed to deposit a thin layer of polymer on the exposed surface.1-3 A good balance between the polymerization and the dielectric etch rate allows the polymer film to passivate the sidewalls without affecting the vertical etch rate, resulting in a vertical etch profile. The polymer formed during the dry etch process ("post-etch polymer residues" or PER), mostly fluorocarbon polymers for fluorocarbon-containing plasmas, must be removed prior to deposition of subsequent layers (metal) in the etched features to achieve high adhesion and good coverage. Removal of these polymers is usually performed by a combination of a short plasma treatment and wet clean using chemical solutions, or by wet cleans alone. It is known that this type of fluorocarbon polymer is chemically inert to many existing wet clean solutions, including aqueous solutions such as fluoride ion-containing or highly alkaline solutions, and solvent mixtures.4 A short plasma treatment carried out prior to the wet clean step enhances the polymer removal efficiency but also has a drawback of irreversibly damaging the porous dielectrics by material densification, carbon depletion, and increase of hydrophilicity. 1,2,5,6 An alternative approach for improving the residue removal efficiency involves structural modification o...

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Section: Resultssupporting

confidence: 63%

Characterization of Patterned Porous Low-kDielectrics: Surface Sealing and Residue Removal by Wet Processing/Cleaning

Le¹,

Kesters²,

Decoster³

et al. 2016

ECS J. Solid State Sci. Technol.

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“…All spectra are correctedw ith respectt ot he peak positiona t2 85.0 eV (ÀCH 2 À) [32,33] from the pristine LTO electrode sample. [33,34] When the LTOe lectrodes are sodiated,t wo peaks appear.T he signal at 684.0 eV can be assigned to LiF and NaF; [35,36] for all samples, thesep eaks appear at similarb inding energies. [33,34] When the LTOe lectrodes are sodiated,t wo peaks appear.T he signal at 684.0 eV can be assigned to LiF and NaF; [35,36] for all samples, thesep eaks appear at similarb inding energies.…”

Section: Surfaceanalysis After Electrochemical Cyclingmentioning

confidence: 99%

Can Metallic Sodium Electrodes Affect the Electrochemistry of Sodium‐Ion Batteries? Reactivity Issues and Perspectives

et al. 2019

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Sodium‐ion batteries (NIBs) are promising energy‐storage devices with advantages such as low cost and highly abundant raw materials. To probe the electrochemical properties of NIBs, sodium metal is most frequently applied as the reference and/or counter electrode in state‐of‐the‐art literature. However, the high reactivity of the sodium metal and its impact on the electrochemical performance is usually neglected. In this study, it is shown that spontaneous reactions of sodium metal with organic electrolytes and the importance of critical interpretation of electrochemical experiments is emphasized. When using sodium‐metal half‐cells, decomposition products contaminate the electrolyte during the electrochemical measurement and can easily lead to wrong conclusions about the stability of the active materials. The cycling stability is highly affected by these electrolyte contaminations, which is proven by comparing sodium‐metal‐free cell with sodium‐metal‐containing cells. Interestingly, a more stable cycling performance of the Li4Ti5O12 half‐cells can be observed when replacing the Na metal counter and reference electrodes with activated carbon electrodes. This difference is attributed to the altered properties of the electrolyte as a result of contamination and to different surface chemistries.

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“…As shown in Fig. 7a, the C1s XPS spectra indicated that peaks with higher binding energies located at 285.0, 286.7, and 291.1 eV could be assigned to carbon atoms bound to one carbon or one hydrogen atom, two hydrogen atoms, and two fluorine atoms, respectively [31]. A new peak at 283.6 eV attributed to aromatic CH of PC [32] was shown in C1s core level spectra of the PVDF/PC membrane (Fig.…”

Section: Resultsmentioning

confidence: 99%

Effect of benzyl triethylammonium chloride on microstructure of bicomponent polymeric fibers during electrospinning

Liu

Zhao

et al. 2012

Polymer Engineering & Sci

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Effect of benzyl triethylammonium chloride (BTEAC) on the microstructure of electrospun bicomponent fibers, i.e., polyvinylidene fluoride (PVDF)/polycarbonate (PC), polyacrylonitrile (PAN)/polyethylene glycol (PEG), and PAN/PVDF, was investigated in this article. The evolution of morphology and microstructure of the above bicomponent fibers were examined by scanning electron microscopy, transmission electron microscopy, and X‐ray photoelectron spectroscopy. The results showed that distinct core/shell structured fibers were successfully prepared from PVDF/PC and PAN/PVDF via introducing a small amount of BTEAC, whereas only cocontinuous structure was detected in the electrospun PAN/PEG fibers. This study could be an example of electrospun multipolymer dispersions influencing by an organic salt, and it could be extended to control the structure of carbon nanofibers via electrospinning. POLYM. ENG. SCI., 2012. © 2012 Society of Plastics Engineers

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XPS analysis of laser transmission micro-joint between poly (vinylidene fluoride) and titanium

Cited by 106 publications

References 12 publications

Characterization of Patterned Porous Low-kDielectrics: Surface Sealing and Residue Removal by Wet Processing/Cleaning

Characterization of Patterned Porous Low-kDielectrics: Surface Sealing and Residue Removal by Wet Processing/Cleaning

Can Metallic Sodium Electrodes Affect the Electrochemistry of Sodium‐Ion Batteries? Reactivity Issues and Perspectives

Effect of benzyl triethylammonium chloride on microstructure of bicomponent polymeric fibers during electrospinning

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