1995
DOI: 10.1007/bf00322052
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XPS studies of thin polycyanurate films on silicon wafers

Abstract: Tomographic scanners are classified by various parameters, and two which are important are the geometric resolution and the contrast resolution. A numerical study has been reported previously on the application of certain estimates of theoretical error in the tomographic inversion formula. This study deals with the experimental aspects of those error estimates, and further consolidates the findings of the previous work in representing contrast by a mathematical quantity related to the object cross-section. Thi… Show more

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Cited by 13 publications
(11 citation statements)
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“…XPS analysis of uncoated silicon wafer showed atomic concentrations of 62, 33 and 5% for silicon, oxygen and adventitious carbon, respectively. The detected oxygen originates from the SiOH groups present in the native oxide layer of silicon as described in the literature . Figure shows elemental compositions from XPS spectra of ppOD coatings as a function of the W / F ratio.…”
Section: Resultsmentioning
confidence: 95%
See 1 more Smart Citation
“…XPS analysis of uncoated silicon wafer showed atomic concentrations of 62, 33 and 5% for silicon, oxygen and adventitious carbon, respectively. The detected oxygen originates from the SiOH groups present in the native oxide layer of silicon as described in the literature . Figure shows elemental compositions from XPS spectra of ppOD coatings as a function of the W / F ratio.…”
Section: Resultsmentioning
confidence: 95%
“…The detected oxygen originates from the Si-OH groups present in the native oxide layer of silicon as described in the literature. [23] Figure 1 shows elemental compositions from XPS spectra of ppOD coatings as a function of the W/F ratio. The W/F parameter, also known as input specific energy (in [kJ Á cm À3 ]), represents the available energy per unit volume of the monomer.…”
Section: Influence Of Input Specific Energymentioning
confidence: 99%
“…As shown in Figure , there were multiple overlapping peaks around 282.4 eV on the C 1s spectrum of (NVOC‐AUT)‐Au surface, an evidence of different carbon bonding present on (NVOC‐AUT)‐Au surface. For example, the peak at 282.4 eV was likely caused by the electron emission of the aromatic and aliphatic carbon; the shoulder peak at 283.9 eV could be attributed to carbon atoms connected to oxygen, nitrogen, and sulfur; the distinguishing peak at 287.1 eV was a shake‐up excitation caused by the π → π* transition in the aromatic ring . After UV irradiation, the disappearance of the broad π → π* transition peak at around 287.1 eV was the conclusive evidence to suggest the removal of caging agent, nitrobenzyl ring, from the surface.…”
Section: Resultsmentioning
confidence: 99%
“…the functional groups as C-O-C or C-OH; position 288.0 (pink line) corresponds to functional groups as C¼O or O-C-O; position 289.8 eV (gray line) attributed to carbon atoms indicated by asterisk in the functional groups like C-O-C*¼O or HO-C*¼O; position 291.4 eV (blue line) attributed to shake-up structure caused by the p! p* transition in the graphite rings (Dieckhoff et al, 1995). The binding energy assignments described above are based on the energy shifts given in Appendix E of the book of Briggs and Grant (2003).…”
Section: Resultsmentioning
confidence: 99%