1992
DOI: 10.1016/0169-4332(92)90293-7
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XPS study of a SiC film produced on Si(100) by reaction with a C2H2 beam

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Cited by 120 publications
(50 citation statements)
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“…by a component at 101.8Ϯ0.2 eV, consistent with the peak position 6 for SiC, with a lesser component at 99.5Ϯ0.2 eV and corresponding to elemental silicon. The presence of SiC at this stage is also confirmed by a C 1s component ͓Fig.…”
Section: B Xps Depth Profilingsupporting
confidence: 57%
“…by a component at 101.8Ϯ0.2 eV, consistent with the peak position 6 for SiC, with a lesser component at 99.5Ϯ0.2 eV and corresponding to elemental silicon. The presence of SiC at this stage is also confirmed by a C 1s component ͓Fig.…”
Section: B Xps Depth Profilingsupporting
confidence: 57%
“…The high BE signal (at ~104 eV) remains assigned to Si in the 4+ state, and its shift may, again, be associated with the work function change. Regarding the low BE signal at ~101 eV, XPS studies available in the literature on Si-based materials allow us to assign this peak to Si cations coordinated to C like in silicon carbide [24][25][26].…”
Section: Resultsmentioning
confidence: 99%
“…Simple hydrocarbons are possible sources for making SiC and for growing thin diamond films. [1][2][3][4] Acetone has been proposed, and studied, as a potential source of methyl radicals ͑produced by photodissociation͒ which may be used to form thin diamond films on silicon. 5 There has also been interest in using carbonyl functional groups to chelate metals; the chelated metals are then either delivered to or removed from a Si or oxide surface, e.g., copper ͑II͒ bis͑acety-lacetonate͒ ͓Cu(acac) 2 ͔ and copper ͑II͒ bis͑1,1,1,5,5,5-hexafluoropentanedionate͒ ͓Cu(u f ac) 2 ͔.…”
Section: Introductionmentioning
confidence: 99%