1998
DOI: 10.1016/s0368-2048(97)00274-0
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XPS, USXS and PLS investigations of porous silicon

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Cited by 36 publications
(19 citation statements)
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“…Since the reconstruction of XANES spectra in this energy range can be due only to the change of the nearest neighboring for silicon atoms by oxygen ions the obtained results allow to assume that the result of oxidation of porSi surface does not respond to SiO 2 oxide. According to the data of X-ray emission and XPS measurements the surface oxide layer represents a mixture of the oxide SiO 2 and sub-oxide SiO x [7,9,13,14]. Therefore, it is possible to consider that XANES spectra of nanoporous silicon also indicate at the formation of sub-oxides SiO x , where x differs from 2, on the surface of por-Si.…”
Section: Xanes Resultsmentioning
confidence: 99%
“…Since the reconstruction of XANES spectra in this energy range can be due only to the change of the nearest neighboring for silicon atoms by oxygen ions the obtained results allow to assume that the result of oxidation of porSi surface does not respond to SiO 2 oxide. According to the data of X-ray emission and XPS measurements the surface oxide layer represents a mixture of the oxide SiO 2 and sub-oxide SiO x [7,9,13,14]. Therefore, it is possible to consider that XANES spectra of nanoporous silicon also indicate at the formation of sub-oxides SiO x , where x differs from 2, on the surface of por-Si.…”
Section: Xanes Resultsmentioning
confidence: 99%
“…It is much less for the sample A. One should note that if silicon sample has a peak at ~ 95 eV, it corresponds to the presence of Si-O bonds [6]. Hence, the sample A is oxidized much less than the sample obtained by the routine technology (sample B).…”
Section: Introductionmentioning
confidence: 96%
“…The energy broadening for these spectra was less than 0.2 eV. The obtained X-ray emission spectra were processed with the use of specially elaborated computer program allowing to determine phase composition for the obtained por-Si layers with the account of the contribution into experimental spectra of the components that can be involved in the porous layer [5,6].…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, L 2,3 absorption spectra represent the distribution of s,d unoccupied states. According to [1,17], porous silicon is a complex multi-phase system and its composition varies along the depth of the porous layer as well as with the time (ageing effect). [18].…”
mentioning
confidence: 99%
“…This property proves to be very useful for the study of the electron structure of the complicated multi-phase substances. Analysis of the X-ray spectra of the investigated samples of the investigated samples has been carried out by comparison with those ones of the reference compounds [17,19]. Let us consider Si L 2,3 emission spectra of porous layers presented in Fig.…”
mentioning
confidence: 99%