1996
DOI: 10.1016/s0257-8972(96)03044-7
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XRD characterization of ion-implanted TiN coatings

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Cited by 28 publications
(21 citation statements)
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“…The preferred orientation was quantified by the width of the -scans (sample scan at a constant detector position), because we expected a fibre-shaped texture as found earlier for UN thin films [2]. Anisotropy of the lattice deformation was investigated using the modified sin 2 ψ method [6] applied to different diffraction lines. It is based on the assumption that crystallites are deformed by the residual stress depending on their orientation with respect to the substrate.…”
Section: Methodsmentioning
confidence: 99%
“…The preferred orientation was quantified by the width of the -scans (sample scan at a constant detector position), because we expected a fibre-shaped texture as found earlier for UN thin films [2]. Anisotropy of the lattice deformation was investigated using the modified sin 2 ψ method [6] applied to different diffraction lines. It is based on the assumption that crystallites are deformed by the residual stress depending on their orientation with respect to the substrate.…”
Section: Methodsmentioning
confidence: 99%
“…This means that the current orientation relationship between fcc-(Ti, Al) N and w-AlN and the preceding lattice parameters of these phases cause an expansion of the elementary cell of fcc-(Ti, Al) N and a compression of the elementary cell of w-AlN. The lattice expansion of fcc-(Ti, Al) N could cause compressive residual stress in this phase, if the inplane expansion of the fcc-(Ti, Al) N crystallites is constrained by the adhesion of the coating to the substrate [37] or if the fcc-(Ti, Al) N/w-AlN interfaces form preferentially in the perpendicular direction to the substrate. Another possible result of the lattice misfit between fcc-(Ti, Al) N and w-AlN is an inhomogeneous local lattice deformation that is responsible for a part of the XRD line broadening, as discussed later in this section.…”
Section: A Phase Composition Of As-deposited Coatingsmentioning
confidence: 99%
“…The stress-free lattice parameter is substantially larger than the intrinsic value for UN (4.89 ), which is probably due to the random occupation of tetrahedral positions in the fcc structure by nitrogen or argon. The same fan-like distribution of the lattice parameters was obtained using our former structure model, [10] in which simply the maximum lattice deformation is assumed to be in the crystallographic direction á111ñ. The later model is advantageous if the single-crystalline elastic constants of the material are not known.…”
Section: Functional Cubic Thin Films ð a Structure Viewmentioning
confidence: 66%