The effect of adding minor elements, such as Ti, Mg, Zr, Ca or Hf, on the size of oxide particles was investigated in Ni-based ODS alloy, Ni-0.5 mass%Al-1 mass%Y 2 O 3 . Among these elements, Hf is the most effective at refining the oxide particles, particularly at a concentration of 0.8 mass% Hf, as verified by TEM observation and hardness measurement. X-ray diffraction measurements indicate that the formation of Y 2 Hf 2 O 7 is responsible for the refinement of oxide particles. The Hf is also effective for a commercial superalloy of PM1000.