Young’s modulus and ferroelectric property of BaTiO₃ films formed by aerosol deposition in consideration of residual stress and film thickness

Abstract

Film thickening by aerosol deposition (AD) is effective for the fabrication of self-sustained piezoelectric energy harvesting devices. Here we investigated the properties, microstructure, and residual stresses of BaTiO3 films deposited by AD at different film thicknesses. The Young’s modulus measured by the nanoindentation test showed no thickness dependence; however, it increased from approximately 130 GPa to 160 GPa with annealing. Ferroelectric hysteresis curves showed that the increase in film thickness facilitated polarization switching. The microstructure of the films showed no significant changes with the film thickness, while the results of X-ray diffraction and finite element analysis of thermal stress showed that the residual stress after annealing depended on the film thickness. The energy harvesting performance of the BaTiO3 films deposited by AD may increase owing to the residual stress, rather than the increase in the film thickness.

Piezotronic Effect Induced Schottky Barrier Decrease to Boost the Plasmonic Charge Separation of BaTiO3-Au Heterojunction for the Photocatalytic Selective Oxidation of Aminobenzyl Alcohol

“…Interestingly, the catalytic conversion ratio was not increased with the amplifying frequency, which could be attributed to the nature of the inherent resonance frequency of the BTO. In principle, the first-order resonance frequency of BTO nanocubes can be estimated by the following equation: f normalr = π 2 [ 1 l 2 + 1 w 2 ] D ρ where the l , w, and ρ are the length, width, and density of the nanostructure, respectively; D is the bending rigidity of the material, defined as: D = E · h 3 12 ( 1 − ν 2 ) where h is the thickness, E is the Young’s modulus, and ν is the Poisson’s ratio of the material; the ρ, E, and ν values are set to be 6080 kg/m 3 , 55 GPa, and 0.3, respectively, for BTO nanocubes, , and the dimension of the nanocube is l = w = h = ∼100 nm, and the resonance frequency of BTO nanocube is thus estimated to be ∼45.2 kHz, which is in good agreement with the optimal frequency of 45 kHz in this study.…”

“…where h is the thickness, E is the Young's modulus, and ν is the Poisson's ratio of the material; the ρ, E, and ν values are set to be 6080 kg/m 3 , 55 GPa, and 0.3, respectively, for BTO nanocubes, 36,37 and the dimension of the nanocube is l = w = h = ∼100 nm, and the resonance frequency of BTO nanocube is thus estimated to be ∼45.2 kHz, which is in good agreement with the optimal frequency of 45 kHz in this study.…”

Boosting the piezoelectric coefficients of flexible dynamic strain sensors made of chemically-deposited ZnO nanowires using compensatory Sb doping

“…[126] The piezoelectric composites made of BaTiO 3 and PZT particles with the same volume fraction are expected to exhibit a similar 𝑌 value (𝑖. 𝑒. , 𝑌 ~ 6 MPa). Indeed, their Young's modulus (i.e., 25-260 GPa for PZT [127,128] and 60-120 GPa for BaTiO 3 [129]) is somehow revealed to be of the same order of magnitude as the one of ZnO (i.e., ~ 144 GPa [130,131] and 61-125 GPa [132,133]). Following that procedure, the FoM values for all piezoelectric composites are shown in Table 5.…”

Role of substrate temperature on the performance of BaTiO3/Si photodetector prepared by pulsed laser deposition

“…BaTiO 3 displays tetragonal symmetry, marked by the displacement of titanium and oxygen in opposite directions along the elongated axis (c-axis) 2 . Its applications span a broad spectrum, including but not limited to piezoelectric infrared sensors, capacitors, ultrasonic transducers, dye-sensitized solar cells, ferroelectric random-access memories (FRAMs), electro-optic switches, waveguides, thermistors, and actuators 3 – 5 .…”