Young's modulus evaluation of Si thin film fabricated by compatible process with Si MEMSs

Hirai, Yoshihiko; Marushima, Y.; Nishikawa, Katsuzo; Tanaka, Yukio

doi:10.1109/imnc.2000.872633

Cited by 3 publications

(1 citation statement)

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“…Elwenspoek et al [3] studied the dynamic behavior of active joints for various electrostatic actuator designs. Hirai et al [4][5][6] presented the deflection characteristics of electrostatic actuators with modified electrode and cantilever shapes. Wang [7] applied a feedback control for suppressing the vibration of actuator beams in an electrostatic actuator.…”

Section: Introductionmentioning

confidence: 99%

The Effect of Residual Stress on the Electromechanical Behavior of Electrostatic Microactuators

Hsu

2008

Active and Passive Electronic Components

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This work simulates the nonlinear electromechanical behavior of different electrostatic microactuators. It applies the differential quadrature method, Hamilton's principle, and Wilson-θ integration method to derive the equations of motion of electrostatic microactuators and find a solution to these equations. Nonlinear equation difficulties are overcome by using the differential quadrature method. The stresses of electrostatic actuators are determined, and the residual stress effects of electrostatic microactuators are simulated.

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Section: Introductionmentioning

confidence: 99%

The Effect of Residual Stress on the Electromechanical Behavior of Electrostatic Microactuators

Hsu

2008

Active and Passive Electronic Components

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Dynamic analysis of electrostatic actuators using radial basis function collocation method

Hsu

2010

2010 5th IEEE Conference on Industrial Electronics and Applications

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Residual Vibrations of Electrostatic Micro-Actuators With Novel Shaped Cantilevers

Hsu¹

2009

Journal of Marine Science and Technology

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Young's modulus evaluation of Si thin film fabricated by compatible process with Si MEMSs

Cited by 3 publications

References 1 publication

The Effect of Residual Stress on the Electromechanical Behavior of Electrostatic Microactuators

The Effect of Residual Stress on the Electromechanical Behavior of Electrostatic Microactuators

Dynamic analysis of electrostatic actuators using radial basis function collocation method

Residual Vibrations of Electrostatic Micro-Actuators With Novel Shaped Cantilevers

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