Young’s modulus measurement of a silicon nitride thin-film using an ultrasonically actuated microcantilever

Kim, Yun Young

doi:10.1016/j.measurement.2017.10.029

Cited by 12 publications

(7 citation statements)

References 15 publications

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“…(2). (15,16,21,22) To improve the accuracy of the calculation, the actual length of each cantilever was measured under a microscope (Hirox KH-7700). Finally, fatigue tests were conducted by measuring the deflection of the micromachined cantilevers under cyclic vibrations.…”

Section: Methodsmentioning

confidence: 99%

Mechanical Fatigue Analysis of AlN/SUS430/AlN Heterolayered Foils in Micromachined Devices

Zheng¹,

Minh²,

Nguyen³

et al. 2020

Sensors and Materials

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The combination of piezoelectric aluminum nitride (AlN) films with flexible substrates made of stainless steel (SUS) foils has been applied in low-frequency and robust microdevices, especially in piezoelectric vibration energy harvesters (PVEHs). To find guides in the design of PVEHs, the fatigue properties of micromachined specimens fabricated using SUS430 foils and AlN/SUS430/AlN heterolayered foils were investigated in this work. In particular, the thickness dependence of AlN films on the fatigue behavior of AlN/SUS430/AlN heterolayered foils was investigated. AlN films with different thicknesses of 1 and 2 μm were deposited on 50-μm-thick SUS430 substrates. The specimens for fatigue tests were prepared as cantilevers by microfabrication processes. First, Young's moduli were measured. Fatigue tests were subsequently conducted by resonant bending. The fatigue behavior is discussed in this paper on the basis of both the stress-number of cycle (S-N) curves and the fatigue failures on the surfaces of the cantilevers. The fatigue limits of SUS430 (50 μm), AlN (1 μm)/ SUS430 (50 μm)/AlN (1 μm), and AlN (2 μm)/SUS430 (50 μm)/AlN (2 μm) were estimated to be 264, 291, and 368 MPa, respectively. The larger stiffness of the foils with a heterolayered AlN/SUS430/AlN structure indicated their larger fatigue limit than the SUS430 foil. Fatigue failure in the form of cracks was observed on the surface of SUS430 for AlN (1 μm)/SUS430/ AlN (1 μm) when vibrating at the maximum stress of 488 MPa for 2.9 × 10 7 cycles. Surface defects of intrusions and slip bands rather than cracks were observed on the SUS430 substrate for the heterolayered AlN (2 μm)/SUS430/AlN (2 μm) structure when vibrated at the maximum stress of 605 MPa for 2.9 × 10 7 cycles, resulting in its higher fatigue limit than that of AlN (1 μm)/SUS430/AlN (1 μm). No surface defects on AlN films were observed after undergoing the aforementioned long-cycle vibration.

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Section: Methodsmentioning

confidence: 99%

Mechanical Fatigue Analysis of AlN/SUS430/AlN Heterolayered Foils in Micromachined Devices

Zheng¹,

Minh²,

Nguyen³

et al. 2020

Sensors and Materials

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“…E r is the reduced Young's modulus

E_{r} = \frac{\sqrt{π}}{2} \frac{S}{\sqrt{A}}

where S is the stiffness of the specimen, A is the projected contact area of indentation. In this work, Young's modulus and Poisson's ratio of the diamond indenter are 1140 GPa and 0.07, respectively, whereas the Poisson's ratio of the Si 3 N 4 material is 0.25 [25].…”

Section: Methodsmentioning

confidence: 99%

“…For convenience, it is usual that one used the databases of the software. However, Young's moduli are in a large range [38], before Young's modulus of a sample was measured, the actual value could not be determined directly and easily. The value of Young's modulus of silicon nitride in ANSYS was determined to be 142 GPa, but the measured value E was 120 GPa (E r was 115.1 GPa), yielding a the first column was the measured value, and the other four columns were the simulated values.…”

Section: Parameters Modificationsmentioning

confidence: 99%

“…The properties of micro‐ and nano‐structures usually depend on the fabrication process; therefore, the actual properties of these structures should be measured. For example, the values of Young's modulus are in a large range (52.5–370 GPa) that depend on the fabrication processes and researches [25]. The nanoindentation technique is often used and is simple, rapid, and accurate.…”

Section: Introductionmentioning

confidence: 99%

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Enhancement of microcantilever beams fabrication and determination of their mechanical properties using nanoindentation

Chung

Lin

2019

Micro & Nano Letters

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Microcantilever beams were fabricated through a microelectromechanical system fabrication process; this process was improved by using etched slots. The actual mechanical properties of the cantilever beams can be estimated using a nanoindenter. Various cantilever beam widths and length-to-width ratios were used for evaluation. Five structures of cantilever beams were fabricated and compared. ANSYS software was used to simulate cantilever beam deflections. The etched slots increased the cantilever beam deflections, and the increase in deflection was apparent when the etched slot was located near the base of the beams. Type 4 was a cantilever beam with an etched slot of length L/2 near the base of the beam. The area of the etched slots of type 4 was larger, and the etched slot of type 4 was near the base of the cantilever beam. Type 4 had the shortest etching time, highest fabrication success rate, and greatest deflection. The difference between the measured and simulated (without parameter modification) deflections could exceed 10%. Modifying the force acting point and Young's modulus in the simulations reduced the difference between the measured and simulated deflections to 0.5%. This demonstrates that actual experimental conditions considerably influence simulation results, and this can be beneficial to subsequent studies.

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“…They also determined the residual stress of double clamped bilayer micro beams, which plays an important role in surface effects on microscale structures. Yun [24] evaluated the Young's modulus of a silicon nitride thin film based on microcantilever resonance tests with ultrasonically actuations. When compared with other techniques to investigate micro materials' mechanical behavior, including bending [25], ultrafast laser metrology [26] and bulge tests [27], micocantilever techniques can provide simpler procedures or enhanced detectability.…”

Section: Introductionmentioning

confidence: 99%

Study on the Dynamic Mechanical Properties of Viscoelastic Materials Based on Asymmetrical Sandwich Beams

Qing-qing¹,

Wang²

2018

Applied Sciences

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A modified estimation method for the dynamic mechanical properties of viscoelastic materials via asymmetrical sandwich specimens is presented. In contrast to the traditional vibrating cantilever beam test method (VCBTM), the proposed method allows asymmetrical base beams in sandwich specimens. Based on the complex stiffness method, complex parameters are introduced for general sandwich configurations. Calculation formulas for loss factor and shear modulus of the core material are presented. The effectiveness of this approach is validated numerically and experimentally by analysis of one symmetrical sandwich beam specimen and two specimens with asymmetrical thicknesses and materials. It is shown that dynamic mechanical parameters of the core material can be obtained regardless of sandwiches' symmetry. The proposed method breaks the symmetrical criteria for sandwich specimens and may provide a wider application to measure viscoelastic materials' dynamic properties.

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Young’s modulus measurement of a silicon nitride thin-film using an ultrasonically actuated microcantilever

Cited by 12 publications

References 15 publications

Mechanical Fatigue Analysis of AlN/SUS430/AlN Heterolayered Foils in Micromachined Devices

Mechanical Fatigue Analysis of AlN/SUS430/AlN Heterolayered Foils in Micromachined Devices

Enhancement of microcantilever beams fabrication and determination of their mechanical properties using nanoindentation

Study on the Dynamic Mechanical Properties of Viscoelastic Materials Based on Asymmetrical Sandwich Beams

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