Young's Modulus of Nano Polycrystalline Silicon Film

Lu, Xuebin; Cui, Lin Hai; Ren, Ming

doi:10.1016/j.proeng.2012.01.613

Cited by 4 publications

(3 citation statements)

References 7 publications

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“…Nevertheless, the experimental data can be tentatively compared with finite-element-method simulations (COMSOL Multiphysics) of the nanostring plus hanging frame geometry. Nanocrystalline Si is simulated using a 157-GPa Young's modulus and 0.22 Poisson's ratio, which are compatible with values reported in the literature [34]. In order to reproduce our hybrid standing-and traveling-wave system, we run time-domain simulations, in which a 1-GHz mechanical source at one of the nanostring edges is slowly turned on; after a transient phase, we can then estimate the displacement field propagating into the nanostring.…”

Section: Device Characterizationsupporting

confidence: 72%

High-Frequency Mechanical Excitation of a Silicon Nanostring with Piezoelectric Aluminum Nitride Layers

et al. 2020

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Section: Device Characterizationsupporting

confidence: 72%

High-Frequency Mechanical Excitation of a Silicon Nanostring with Piezoelectric Aluminum Nitride Layers

et al. 2020

View full text Add to dashboard Cite

“…Nevertheless, the experimental data can be tentatively compared with finite-element method simulations (COMSOL Multiphysics) of the nanostring plus hanging frame geometry. Nanocrystalline Si has been simulated using a 157 GPa Young's modulus and 0.22 Poisson's ratio, which are compatible with values reported in the literature 30 . In order to reproduce our hybrid standing/traveling wave system, we run time-domain simulations, in which a 1 GHz mechanical source at one of the nanostring edges is slowly turned on; after a transient phase, we can then estimate the displacement field propagating into the nanostring.…”

Section: Device Characterizationsupporting

confidence: 78%

High frequency mechanical excitation of a silicon nanostring with piezoelectric aluminum nitride layers

Pitanti,

Makkonen,

Colombano

et al. 2020

Preprint

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A strong trend for quantum based technologies and applications follows the avenue of combining different platforms to exploit their complementary technological and functional advantages. Microand nano-mechanical devices are particularly suitable for hybrid integration due to the easiness of fabrication at multi-scales and their pervasive coupling with electrons and photons. Here, we report on a nanomechanical technological platform where a silicon chip is combined with an aluminum nitride layer. Exploiting the AlN piezoelectricity, Surface Acoustic Waves are injected in the Si layer where the material has been localy patterned and etched to form a suspended nanostring. Characterizing the nanostring vertical displacement induced by the SAW, we found an external excitation peak efficiency in excess of 500 pm/V at 1 GHz mechanical frequency. Exploiting the long term expertise in silicon photonic and electronic devices as well as the SAW robustness and versatility, our technological platform represents a strong candidate for hybrid quantum systems.

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“…Nanofilms possess peculiar thermomechanical properties [1][2][3] and can be employed in different applications [4][5][6][7]. The theoretical investigations into the mechanical characteristics of these nanostructures using the continuum mechanics have attracted much attention in recent years.…”

Section: Introductionmentioning

confidence: 99%

Thermal Post-Buckling Analysis of Nanoscale Films Based on a Non-Classical Finite Element Approach

Ansari

Mohammadi

Shojaei

et al. 2015

Journal of Thermal Stresses

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A size-dependent finite element (FE) formulation including surface free energy effect is developed in this article to study the post-buckling behavior of nanofilms under the action of thermal loads. The Gurtin-Murdoch surface elasticity theory is utilized to consider the surface effects. Moreover, the principle of virtual work is used so as to derive the equilibrium equations. The proposed FE formulation is based on the firstorder shear deformation theory (FSDT). The von Kármán nonlinear relations are also employed to take the geometric nonlinearity into account. After deriving the FE equations, the resulting set of parameterized non-linear equations is solved using the pseudo arc-length continuation algorithm, and bifurcation diagrams of nanofilms are obtained. Selected numerical results are presented for the influences of surface stress on the thermal post-buckling characteristics of nanofilms subject to different types of boundary conditions.

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Young's Modulus of Nano Polycrystalline Silicon Film

Cited by 4 publications

References 7 publications

High-Frequency Mechanical Excitation of a Silicon Nanostring with Piezoelectric Aluminum Nitride Layers

High-Frequency Mechanical Excitation of a Silicon Nanostring with Piezoelectric Aluminum Nitride Layers

High frequency mechanical excitation of a silicon nanostring with piezoelectric aluminum nitride layers

Thermal Post-Buckling Analysis of Nanoscale Films Based on a Non-Classical Finite Element Approach

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