Young's modulus of plasma‐polymerized allylamine films using micromechanical cantilever sensor and laser‐based surface acoustic wave techniques

Toda, Masaya; Miyake, Koji; Chu, Li‐Qiang; Zakerin, Marjan; Förch, Renate; Berger, Rüdiger; Itakura, Akiko N.

doi:10.1002/ppap.201800083

Cited by 11 publications

(7 citation statements)

References 60 publications

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“…Good examples of the common trend mentioned before in which increasing input power results on higher elastic modulus can be found in literature [26,34]. In addition, as tribological and mechanical properties are closely related, some tribology results showed to follow a similar behavior.…”

Section: Input Power: a Parameter For Continuous Wave Plasma Polymerizationsupporting

confidence: 60%

“…More recently, Toda et al [34] measured the Young's modulus of plasma polymerized allylamine films through micromechanical cantilever sensor and laser-based surface acoustic wave techniques. The authors observed that smaller Young's modulus values were obtained with surface acoustic waves technique when compared to the micromechanical cantilever sensor.…”

Section: Measurement Techniquesmentioning

confidence: 99%

“…In a similar way to bulk materials, if the plasma thin films are supposed to be used in a different environment, aqueous medium for example, their mechanical properties should also be tested in that condition. For instance, the Young's modulus of plasma-polymerized thin films have also been evaluated in phosphate-buffered saline solutions [38,90] and the influence of humidity on the mechanical properties of plasma thin films has been also assessed [34]. A clear decrease on the elastic modulus was observed with increasing humidity (Fig.…”

Section: Ageing and Post-treatmentsmentioning

confidence: 99%

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Mechanical properties of plasma polymer films: a review

et al. 2021

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Plasma polymers are micro-, or more commonly, nano-sized coatings that can be deposited on a variety of substrates through different approaches. The versatility of these polymers is incremented by the possibility to use other precursors than conventional polymerization reactions and by potential changes in the polymerization mechanisms according to the intrinsic physical and chemical properties of the plasma. That flexibility offers a fruitful ground to a great range of scientific and engineering fields, but it also brings many challenges for universalization of empirical observations. In this review, the use of different precursors, substrates and changes in plasma external parameters were evaluated as common, but not necessarily ideal nor exhaustive, variables for the analysis of mechanical properties of plasma polymer films. The commonly reported trends are complemented with the exceptions, and a variety of hypothesis drawn by the empirical observations are shown. The techniques and methods used for determining the mechanical properties of plasma polymers, the effect of post-treatments on them and some applications are evaluated. Finally, a general conclusion highlighting the challenges of the field is provided. Article highlights The mechanical properties of plasma polymers are evaluated as a function of selected parameters. The techniques of characterization of mechanical properties of plasma polymers are summarized. A discussion of future and current demands for the analysis of mechanical properties of plasma polymers is done.

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Section: Input Power: a Parameter For Continuous Wave Plasma Polymerizationsupporting

confidence: 60%

Section: Measurement Techniquesmentioning

confidence: 99%

Section: Ageing and Post-treatmentsmentioning

confidence: 99%

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Mechanical properties of plasma polymer films: a review

et al. 2021

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“…For comparison, the Young’s modulus of a 55 nm polyethylene membrane was estimated at 10 GPa [ 27 ], that of carbon nanomembranes of 1 nm thickness was reported to be 45 GPa [ 28 ], that of a vapor-deposited, 30 nm tris(8-hydroxyquinoline) aluminum film was 2.81–3.88 GPa [ 29 ], and that of 320 nm Si membrane was 220 GPa [ 30 ]. One of the lowest Young’s modulus values (32 MPa) was reported for ~100 nm plasma-polymerized allylamine films [ 31 ], but even this value is more than an order of magnitude higher than that for the PEG membranes.…”

Section: Resultsmentioning

confidence: 98%

Elastic Properties of Poly(ethylene glycol) Nanomembranes and Respective Implications

Zhao

Zharnikov

2022

Membranes

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Free-standing poly(ethylene glycol) (PEG) membranes were prepared from amine- and epoxy-terminated four-arm STAR-PEG precursors in a thickness range of 40–320 nm. The membranes feature high stability and an extreme elasticity, as emphasized by the very low values of Young’s modulus, varying from 2.08 MPa to 2.6 MPa over the studied thickness range. The extreme elasticity of the membranes stems from the elastomer-like character of the PEG network, consisting of the STAR-PEG cores interconnected by crosslinked PEG chains. This elasticity is only slightly affected by a moderate reduction in the interconnections at a deviation from the standard 1:1 composition of the precursors. However, both the elasticity and stability of the membranes are strongly deteriorated by a strong distortion of the network imposed by electron irradiation of the membranes. In contrast, exposure of the membranes to ultraviolet (UV) light (254 nm) does not affect their elastic properties, supporting the assumption that the only effect of such treatment is the decomposition of the PEG material with subsequent desorption of the released fragments. An analysis of the data allowed for the exclusion of so called “hot electrons” as a possible mechanism behind the modification of the PEG membranes by UV light.

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“…Such surface stress measurement based on the bending might not be effective because of the energy loss for bending in the vertical direction and for slipping in the lateral direction due to the low bonding strengths at the interface between the Si surface and absorber material [15]. In addition, the vertical swelling of one-side free film causes an extra low Young's modulus of absorber during swelling and results in lower surface stress changes applied to sensors [16]. In order to more efficiently transduce the swelling effect of the absorber to strain in the piezoresistive element and, therefore, achieve higher sensitivity, we embed the absorber in the sensor.…”

Section: Introductionmentioning

confidence: 99%

Piezoresistive Nanomechanical Humidity Sensors Using Internal Stress In-Plane of Si-Polymer Composite Membranes

et al. 2019

Self Cite

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This article presents the design and fabrication process of a highly miniaturized nanomechanical Si-polymer composite membrane-type internal-stress sensor (MIS) with piezoresistive elements for humidity detection. The 500-μm 2 area dimension sensor consists of a thin Si-polymer composite membrane supported by two piezoresistive Si beams. The composite membrane is fabricated as follows: First, 1-μm-wide width Si slits with 1 μm separation gaps are formed by using photolithography and deep reactive-ion etching, and then, the Si slits are filled with a functional polymer (methyl methacrylate based acrylate resin: OLESTER TM Q155). This composite device acts as an absorber of vapor molecules and, consequently, generates stress. The fabricated sensor in a humidity-controlled chamber shows a relative resistance change R/R device = 0.6% for 58% relative humidity (RH) change and a highly linear steady response of 5.2 mV/%RH up to 70% RH change with sensing resolution of 0.5% humidity. The measured polymer expansion ratio of ϵ p = 2.4 × 10 −3 is consistent with the theoretical estimation using the weight fraction of water adsorbed in the polymer.

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Young's modulus of plasma‐polymerized allylamine films using micromechanical cantilever sensor and laser‐based surface acoustic wave techniques

Cited by 11 publications

References 60 publications

Mechanical properties of plasma polymer films: a review

Mechanical properties of plasma polymer films: a review

Elastic Properties of Poly(ethylene glycol) Nanomembranes and Respective Implications

Piezoresistive Nanomechanical Humidity Sensors Using Internal Stress In-Plane of Si-Polymer Composite Membranes

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