Young's modulus of thin films using a simplified vibrating reed method

Whiting, R.; Angadi, M. A.

doi:10.1088/0957-0233/1/7/024

Cited by 19 publications

(12 citation statements)

References 9 publications

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“…Moreover, there is no sufficient data for these values for cryogenic temperatures. The Young's modulus for Chromium thin films Y Cr varies from 90 GPa [32,33] to 240 GPa [33,34] with Y Cr ≈ 170 GPa being the most appropriated value in our case [32]. As for deposited Gold, Y Au ≈ 75 GPa is a convergent value [33,35,36].…”

Section: Discussionmentioning

confidence: 77%

A new method of probing mechanical losses of coatings at cryogenic temperatures

Galliou

Deléglise

Goryachev

et al. 2016

Review of Scientific Instruments

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A new method of probing mechanical losses and comparing the corresponding deposition processes of metallic and dielectric coatings in 1-100 MHz frequency range and cryogenic temperatures is presented. The method is based on the use of extremely high-quality quartz acoustic cavities whose internal losses are orders of magnitude lower than any available coatings nowadays. The approach is demonstrated for Chromium, Chromium/Gold and a multilayer tantala/silica coatings. The Ta2O5/SiO2 coating has been found to exhibit a loss angle lower than 1.6 × 10 −5 near 30 MHz at 4 K. The results are compared to the previous measurements.

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Section: Discussionmentioning

confidence: 77%

A new method of probing mechanical losses of coatings at cryogenic temperatures

Galliou

Deléglise

Goryachev

et al. 2016

Review of Scientific Instruments

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“…180 GPa 91 instead of 280 GPa 92 for bulk chromium. Whiting and Angadi 93 showed that the Young’s modulus increases from ~240 to ~260 GPa over a chromium thickness range of 85–300 nm. This trend follows the model given by Sun and Zhang 94 which predicts a significant fall in the value of Young’s modulus under a critical thickness value.…”

Section: Resultsmentioning

confidence: 99%

Controlled mud-crack patterning and self-organized cracking of polydimethylsiloxane elastomer surfaces

Seghir¹,

Arscott²

2015

Sci Rep

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Exploiting pattern formation – such as that observed in nature – in the context of micro/nanotechnology could have great benefits if coupled with the traditional top-down lithographic approach. Here, we demonstrate an original and simple method to produce unique, localized and controllable self-organised patterns on elastomeric films. A thin, brittle silica-like crust is formed on the surface of polydimethylsiloxane (PDMS) using oxygen plasma. This crust is subsequently cracked via the deposition of a thin metal film – having residual tensile stress. The density of the mud-crack patterns depends on the plasma dose and on the metal thickness. The mud-crack patterning can be controlled depending on the thickness and shape of the metallization – ultimately leading to regularly spaced cracks and/or metal mesa structures. Such patterning of the cracks indicates a level of self-organization in the structuring and layout of the features – arrived at simply by imposing metallization boundaries in proximity to each other, separated by a distance of the order of the critical dimension of the pattern size apparent in the large surface mud-crack patterns.

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“…For example, in the case of bilayer coatings, Whiting et al [26,27] and Harms et al [28] employed the so called "vibration reed" method, which allows the computation of the elastic modulus of one layer of the coating from the shift in natural frequency of the beam without and with the second layer.…”

Section: Introductionmentioning

confidence: 99%

“…More recently, López-Puerto and co-workers [31] were able to extend the methodology proposed by Whiting et al [26,27] and Harms et al [28], to the analysis of multilayer coatings by developing an integral approach, which allows the computation of the elastic modulus of a single layer in a multilayered system in cantilever configuration, by measuring the natural frequency of the complete multilayered cantilever beam. These authors were able to verify the accuracy of the model by comparing the predicted values of the fundamental frequency with those predicted by a three dimensional finite element model of laminated cantilever beams for systems of three layers composed of two dissimilar metallic films, with thicknesses less than 250 nm, deposited onto a polymeric substrate.…”

Section: Introductionmentioning

confidence: 99%

A description of the composite elastic modulus of multilayer coated systems

2015

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To cite this version:E.S. Puchi-Cabreraa, M.H. Staia, Alain Iost. A description of the composite elastic modulus of multilayer coated systems. Thin Solid Films, Elsevier, 2015, 583, pp.177-193. 10 The evaluation of the elastic response of coated systems under indentation loading represents a crucial issue, which determines the behavior of such systems under tribological applications. Although a number of models have been proposed in the literature for the description of the change in the composite modulus with indentation depth, as well as for the determination of the elastic modulus of monolayer coatings, only few works address the analysis of multilayer coatings. The present work proposes a general methodology, which allows the modification and extension of the models employed in the analysis of monolayer coatings, for the study of the elastic response of multilayer coatings. Bull for a bilayer coated system. It has been shown that the different models analyzed are able to provide a satisfactory description of the experimental data, although the quality of the fit depends on the number of material parameters involved in each model. The mean square error of the fit is employed for conducting a comparison between the models.

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Young's modulus of thin films using a simplified vibrating reed method

Abstract: A simplified vibration technique for the determination of Young's modulus for a wide variety of thin films and coatings is presented. Some representative data on chromium and copper films is reported.

Cited by 19 publications

References 9 publications

A new method of probing mechanical losses of coatings at cryogenic temperatures

A new method of probing mechanical losses of coatings at cryogenic temperatures

Controlled mud-crack patterning and self-organized cracking of polydimethylsiloxane elastomer surfaces

A description of the composite elastic modulus of multilayer coated systems

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