1987
DOI: 10.1016/0040-6090(87)90167-2
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Young's modulus of TiN, TiC, ZrN and HfN

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Cited by 255 publications
(34 citation statements)
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“…This can be attributed to the fact that the data sheet value cited is a bulk value, rather than one obtained via nanoindentation methods. As regards the diffusion-treated substrate, E values are in accordance with the estimated 280-620 GPa range measured for δ-TiN [31].…”
Section: Hardness Testingsupporting
confidence: 68%
“…This can be attributed to the fact that the data sheet value cited is a bulk value, rather than one obtained via nanoindentation methods. As regards the diffusion-treated substrate, E values are in accordance with the estimated 280-620 GPa range measured for δ-TiN [31].…”
Section: Hardness Testingsupporting
confidence: 68%
“…The peak positions were determined by fitting a pseudo-voigt function to the data. The obtained lattice parameters, a w (h k l), were then plotted as a function of sin 2 w. By fitting a linear function to the experimental data the stress was extracted following the procedure outlined by Tengstrand [17] and assuming isotropic elastic constants of E ZrN = 460 GPa and t ZrN = 0.25 [18]. Abadias et al [19,20], have shown that this method provides a reasonable estimation of the residual stresses of epitaxial and textured films for different materials.…”
Section: Methodsmentioning
confidence: 99%
“…This was also observed as the fraction of TiC increased and the amount of amorphous phase decreased in Ti-Si-C films. 51 The value for the ZrAlN film is after annealing at 1400°C 348 GPa, between the values for c-ZrN (460 GPa 53,54 ) and h-AlN (300 GPa 55,56 ).…”
Section: Mechanical Propertiesmentioning
confidence: 99%