Yttrium oxide thin films prepared under different oxygen-content atmospheres: microstructure and optical properties

Controllable phase formation and physical properties of yttrium oxide films governed by substrate heating and bias voltage

“…Although the roughness values are floating at different substrate temperatures, the effects of ions bombardment are very clear for samples at three different temperatures. In area 1, with slight ion bombardment, the roughness value is slightly larger due to the high crystallinity [7]; whereas in area 2, as the bias voltage increases, the roughness reduces dramatically to $ 0.7 nm at RT and to the lowest value ($ 0.3 nm) at 200 1C and 600 1C, which is similar to the previous reports [29,30], corresponding well with the AFM images as shown in Fig. 3.…”

“…They can be deconvoluted into two single peaks (Fig. 5(e)) corresponding to the O-Y [31] and O δ (physisorbed O or OH) [7,32]. All O1s peaks exhibit the same feature.…”

“…Numerous studies have reported that yttrium oxide films can be used in a wide variety of scientific and engineering applications due to their natural properties. They include high crystallographic stability (up to 2325 1C) [1,2], superior mechanical strength [3], high permittivity ($ [14][15][16][17][18] [4,5], high refractive index ($ 2) [6,7], wide band gap ($ 5.8 eV) [8], low lattice mismatch with silicon (cubic phase) [9] and graphene (hexagonal phase) [10], wellknown host matrix for rare-earth ions [11,12], and a component of several complex materials [13,14].…”

“…Up to now, yttrium oxide films have been prepared by various methods, including molecular beam epitaxy (MBE) [16,17], pulsed laser deposition (PLD) [8,18], sputtering [7,19,20], electron beam deposition [21] etc. Most reports synthesized the cubic phase, while just a few papers reported the successful formation of other phases of yttrium oxide films.…”

Study on reactive sputtering of yttrium oxide: Process and thin film properties

“…Briefly, owing to high chemical and thermal stability (melting point is up to~2349°C) [1,2], and its mechanical properties (high strength and fracture toughness) [3], yttrium oxide films and particles have been used in thermal or reaction barrier coatings [4] and oxide dispersion strengthened steels [5,6]. Particularly, due to the excellent optical and electric properties, including a wide transmittance range, high refractive index (~2), low absorption, large band gap (~5.4 eV), and high permittivity (~14-18) accompanied with a lattice match with Si and GaAs (for the cubic phase) and graphene (for the hexagonal phase), yttrium oxide thin films become one of the most interesting materials widely used in optical waveguides [7][8][9], and as an antireflective layer [10], or as a high efficiency phosphor by doping with other rare-earth elements [11,12], as well as one component of high-quality metal-oxide-semiconductor (MOS) based devices [13][14][15][16][17][18].…”