1997
DOI: 10.1023/a:1018653631062
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Cited by 20 publications
(8 citation statements)
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“…6a͒ showed predominantly the SiO 2 peak at 103.6 eV plus a broad shoulder over 105-108 eV, which may be assigned to be fluorinated Si species, namely, −SiF x . 12,13 The C ͑1s͒ spectrum ͑Fig. 6b͒ showed a broad band ranging from 285 to 294 eV with a prominent peak at 292.0 eV, The latter binding energy is higher than that of the carbonate species ͑290.8 eV, Fig.…”
Section: A96mentioning
confidence: 98%
See 1 more Smart Citation
“…6a͒ showed predominantly the SiO 2 peak at 103.6 eV plus a broad shoulder over 105-108 eV, which may be assigned to be fluorinated Si species, namely, −SiF x . 12,13 The C ͑1s͒ spectrum ͑Fig. 6b͒ showed a broad band ranging from 285 to 294 eV with a prominent peak at 292.0 eV, The latter binding energy is higher than that of the carbonate species ͑290.8 eV, Fig.…”
Section: A96mentioning
confidence: 98%
“…4a, the Si spectrum shows two peaks, which are respectively attributed to Si ͑99.2 eV͒ and SiO 2 ͑103.6 eV͒. 12,13 With progressive ion-beam sputtering, the intensity of the Si peak increases, while the oxide peak exhibits decreasing intensity. The O ͑1s͒ spectrum initially shows a broad peak with the peak maximum occurring at ϳ533.4 eV, which can be attributed to OH ͑Fig.…”
Section: A96mentioning
confidence: 99%
“…Fig. 4(a) show that two major components are needed to fit the as observed Si 2p peaks of the a-SiCN: H ([N] = 0): one is a low-energy peaked at 100.1 eV, and it is the dominant component of the total Si 2p line attributed to Si-C [35]. Another minor component, which has a higher-energy (101.2 eV), can be assigned to Si-N [27] (most probably due to the contamination of the reactor by NH 3 prior to deposition).…”
Section: Xps Analysismentioning
confidence: 99%
“…It is worth mentioning that the Si 2p deconvoluted spectrum consists of three components [Fig. 4 (d)]; (i) the first component, assigned to Si-C [37] is centered at 100.5 eV and its relative area is~44.2%; (ii) the second component, centered at 101.5 eV with a relative area of~48% could be assigned to Si-N [38,39] and (iii) the third minor component centered at 102.5 eV, and its relative area represents~7.8%. This component may be due to silicon present in the form of Si-O or Si-N [38].…”
Section: Xps Analysismentioning
confidence: 99%
“…A non-aqueous electrolyte medium is indispensably employed to electrodeposit Si. Several papers have been published on the electrodeposition of Si [1][2][3][4][5][6][7][8][9][10]. Organic solvents such as propylene carbonate [1], tetrahydrofuran [2], and acetonitrile [3] were often employed as non-aqueous solvents in the 1980s.…”
Section: Introductionmentioning
confidence: 99%