While many types of transparent conducting oxides (TCOs) have been developed, nitride-based transparent conductors remain rare. We examined the properties of zinc nitride doped with oxygen (Zn 3 N 2−x O x ) as a potential nitridebased transparent conductor. Electron density on the order of 10 20 cm −3 was achieved by heavy oxygen doping. A minimal resistivity (ρ) of 6.2 × 10 −4 Ω cm, comparable to those of TCOs, was observed for x = 0.19. Notably, the Zn 3 N 1.81 O 0.19 films had high electron mobility of 85 cm 2 V −1 s −1 , 2−3 times larger than the values for TCOs. Detailed analyses of mobility revealed that the electron transport was governed by ionized impurity scattering, and the dominant scattering center was substitutional oxygen. The contributions of additional scattering mechanisms were relatively minor. These findings explain the high observed mobility in Zn 3 N 2−x O x films. Contrary to our expectations, visible transmittance of Zn 3 N 2−x O x films was below 40%. X-ray photoelectron spectrometry suggested the existence of self-interstitial nitrogen (N I ) in Zn 3 N 2−x O x films. Low transmittance was attributable to optical absorption by electron transitions between the in-gap state originated from N I bonded to lattice nitrogen (N N ) and the band states. These results suggest that, when the formation of N N −N I bond is suppressed, Zn 3 N 2−x O x can be a high-mobility transparent conductor.