2021
DOI: 10.1109/access.2021.3098061
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ZnO Based Resistive Random Access Memory Device: A Prospective Multifunctional Next-Generation Memory

Abstract: Numerous works that have demonstrated the study and enhancement of switching properties of ZnO-based RRAM devices are discussed. Several native point defects that have a direct or indirect effect on ZnO are discussed. The use of doping elements, multi-layered structures, suitable bottom and top electrodes, controlling the deposition materials, and the impact of hybrid structure for enhancing the switching dynamics are discussed. The potentials of ZnO-based RRAM for invisible and bendable devices are also cover… Show more

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Cited by 44 publications
(22 citation statements)
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References 332 publications
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“…In RRAM using ZnO, oxygen ions were involved in forming conductive filaments in ZnO combined with the top electrode during the set/reset operation, and the endurance property was degraded [ 5 , 23 , 24 ]. In order to prevent this degradation, a SiCN thin film (4MS PPR of 5%) was suggested for the first time to block the oxygen ions from combining with the top electrode and served as temporary oxygen storage between the top electrode and ZnO [ 12 , 13 , 14 , 15 ].…”
Section: Resultsmentioning
confidence: 99%
“…In RRAM using ZnO, oxygen ions were involved in forming conductive filaments in ZnO combined with the top electrode during the set/reset operation, and the endurance property was degraded [ 5 , 23 , 24 ]. In order to prevent this degradation, a SiCN thin film (4MS PPR of 5%) was suggested for the first time to block the oxygen ions from combining with the top electrode and served as temporary oxygen storage between the top electrode and ZnO [ 12 , 13 , 14 , 15 ].…”
Section: Resultsmentioning
confidence: 99%
“…ZnO and Zn 2 SnO 4 (ZSO) are two prominently studied metal oxide semiconductors with wide optical bandgap of 3.3 and 3.88 eV, respectively, and have great potential for visible light sensors because of their fascinating optical properties and strong absorption in ultraviolet (UV) region. [ 19–21 ]…”
Section: Introductionmentioning
confidence: 99%
“…Among all the material candidates, zinc oxide (ZnO) is a suitable material which has both required properties . Indeed, ZnO-based RSM has been studied quite intensively with different morphologies, including polycrystalline, nanorod, and amorphous . Moreover, the ultraviolet luminescence from ZnO, which has a wide direct band gap of about 3.37 eV and an exciton binding energy of about 60 meV at room temperature, has also been widely investigated. Accordingly, our intended new type of light-emitting RSM can be established with ZnO as the active layer.…”
Section: Introductionmentioning
confidence: 99%