bias stress instability and performance changes of multi-cation AOS TFTs under visible light illumination, into the valence band resulting in an inherent stability of zinc oxynitride (ZnON) TFTs under bias stress and/or visible light illumination. [2][3][4] Besides attracting attention as active channel material in TFTs, ZnON was demonstrated to offer great potential for photosensitive devices with negligible persistent photoconduction due to its low band gap of about 1.0-1.3 eV and the position of the transition level of the oxygen vacancy within the valence band, respectively. [4][5][6] The issues of reproducibility and long-term stability that are associated with the nitrogen incorporation have been countered by argon plasma treatment, [7] annealing, [2,8,9] and/or encapsulation. [10,11] So far, amorphous ZnON (a-ZnON) was used as channel material within metal-insulator-semiconductor fieldeffect transistors (MISFETs), [2][3][4]8,9,[12][13][14] in this study, we investigate the electrical characteristics of metal-semiconductor field-effect transistors (MESFETs) based on amorphous n-type ZnON channel. MESFETs are especially suited for low-voltage and high-frequency applications due to the missing gate dielectric. Further, this reduces functionalization of the gate contact to the deposition of a metal layer for which a reactive magnetron sputtering process at room temperature is used in the current study. Recently, Schottky diodes and MESFETs based on amorphous zinc-tin oxide (a-ZTO) were demonstrated to be capable of realizing low-voltage operating logic circuits. [15] Combining this device concept with high-mobility a-ZnON seems to be a very promising approach for future sustainable integrated circuit based on AOS. Besides, Schottky diodes can be used for characterization of basic material properties by, e.g., thermal admittance spectroscopy or deep level transient spectroscopy.
Results and DiscussionHall effect measurements at room temperature reveal a free electron concentration of n = 1.5 × 10 17 cm −3 and a Hall mobility of μ Hall ≈ 100 cm 2 V −1 s −1 for the as-received a-ZnON thin film. Figure 1a shows the Schottky diode jV characteristic at room temperature with a rectification ratio of 3.8 × 10 3 at ±2 V. Modeling of the diode forward current according to the Shockley equation j j e V IR k T V IR AR exp 1 s s B s p η ( ) = − − + − (1) Electrical properties of metal-semiconductor field-effect transistors (MES-FETs) based on the amorphous n-type multi-anion compound zinc oxynitride (ZnON) comprising reactively sputtered platinum as Schottky gate are presented. The Schottky barrier diodes reveal a rectification ratio of 4 × 10 3 at ±2 V and an ideality factor of 1.43. The investigated MESFETs show good switching characteristics with a switching voltage below 2 V, low subthreshold swing of 112 mV dec −1 and reasonable current on/off ratios up to 5 × 10 5 . Additionally, the stability of the devices under visible light illumination is proven.