“…X-ray reciprocal space maps allow for the determination of both the position and the broadening of a selected reflection in reciprocal space, and are thus often employed to study the structural properties of epitaxial group III nitride films (Holý et al, 1993;Heinke et al, 1994;Metzger et al, 1998;Chierchia et al, 2001Chierchia et al, , 2003Paduano et al, 2003;Kirste et al, 2005;Vickers et al, 2005;Kyutt et al, 2009;Barchuk et al, 2010Barchuk et al, , 2011Lazarev et al, 2013). The interpretation of these maps is frequently based on the assumption that the film constitutes a mosaic crystal (Holý et al, 1993;Rubini et al, 2000;Chierchia et al, 2001Chierchia et al, , 2003, picturing the film as consisting of finite-sized crystal blocks rigidly rotated with respect to each other. The broadening of reciprocal lattice points as observed in reciprocal space maps is interpreted in terms of the out-of-plane misorientation (the 'tilt') of the blocks with respect to each other and the average block size defining the lateral coherence length for the X-ray wavefield.…”