ZrCoCe Getter Films for MEMS Vacuum Packaging

Xu, Yaohua; Cui, Jiandong; Cui, Haipo; Zhou, Hao; Yang, Zhiliang; Du, Jun

doi:10.1007/s11664-015-4098-5

Cited by 17 publications

(15 citation statements)

References 9 publications

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“…Bulk getters were developed for vacuum chambers or cavities that are incompatible with the continuous evaporation of materials and cannot withstand the high annealing temperatures at which flashed getters are sublimated (>1000 °C). ,, Bulk getters are often integrated in vacuum packaged MEMS devices for maintaining proper operating conditions for the lifetime of the device (10+ years). , The vacuum requirement varies depending on the application and ranges between 10 –4 and 225 Torr . Considering a hermetically sealed cavity (i.e., no leakage), material outgassing would be the only source of pressure increase within MEMS cavities .…”

Section: Introductionmentioning

confidence: 99%

“…Petti et al concluded that the Zr–Co-REM getter is activated at 300 °C by reducing the ZrO 2 species to its metallic form and a segregation of Co toward the surface at 450 °C. On the other hand, Xu et al examined the effect of annealing temperature on the microstructure, as well as the resistance of the getter to various wafer cleaning processes by examining the getter’s sorption characteristics . Despite the recent efforts in providing a complete study of the gettering properties of the Zr–Co-REM alloy, a rigorous study of the physical and chemical characteristics of the alloy are still missing.…”

Section: Introductionmentioning

confidence: 99%

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Temperature-Dependent in Situ Studies of Volatile Molecule Trapping in Low-Temperature-Activated Zr Alloy-Based Getters

Abboud

Moutanabbir

2017

J. Phys. Chem. C

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The activation process and the gettering mechanisms of Zr−Corare earth metal alloy getters were investigated. The evolution of the surface composition prior to and upon exposure to volatile molecules (O 2 , N 2 , CO 2 ) was monitored in situ using X-ray photoelectron spectroscopy under annealing conditions compatible with low processing temperature regimes. The thermally activated process of surface oxygen diffusion into the bulk was elucidated and found to involve an activation energy of 0.21 ± 0.02 eV in the 200−350 °C temperature range. This activation process was also found to reversibly transform ZrO 2 into Zr(OH) 2 through the interaction with thermally desorbed hydrogen. Carbidic species form upon annealing at 250 °C via the interaction with an adventitious carbon layer on the surface, which results in the decrease in the number of surface sites available for subsequent gettering. In situ studies of the material reactivity with high purity O 2 , N 2 , and CO 2 were also investigated. O 2 was found to saturate the surface after single exposure, while CO 2 dissociates into CO and O − , where O − is incorporated deeper in the material and CO forms an ad-layer on the surface of the getter. N 2 was found to weakly interact with the partially activated surface and to form ZrN only upon annealing the sample to 350 °C indicating the poor reactivity of the material with N 2 at room temperature. The results display the importance of ridding systems of residual gases, especially N 2 , by properly degassing the system prior to sealing to minimize and/or eliminate trapped gases within devices during operation.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Temperature-Dependent in Situ Studies of Volatile Molecule Trapping in Low-Temperature-Activated Zr Alloy-Based Getters

Abboud

Moutanabbir

2017

J. Phys. Chem. C

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“…These NEG films are deposited and patterned on the assemblies for vacuum packaging. The underlayer metal atoms diffuse into the inner surface of the package and absorb the residual gases by activating the NEG film at a high temperature after packaging 7 – 10 .…”

Section: Introductionmentioning

confidence: 99%

Bonding formation and gas absorption using Au/Pt/Ti layers for vacuum packaging

et al. 2022

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In this study, we developed a metal multilayer that can provide hermetic sealing after degassing the assemblies and absorbing the residual gases in the package. A package without a leak path was obtained by the direct bonding of the Au/Pt/Ti layers. After packaging, annealing at 450 °C caused thermal diffusion of the Ti underlayer atoms to the inner surface, which led to absorption of the residual gas molecules. These results indicated that a wafer coated with a Au/Pt/Ti layer can provide hermetic sealing and absorb residual gases, which can simplify vacuum packaging processes in the electronics industry.

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“…The state-of-art in this domain concerns two ternary alloys: Ti-Zr-V and Zr-Co-RE. Activation temperatures as low as 200°C-1h [2] or 160°C-2h [4] for Ti-Zr-V alloy and 200°C-30 min for Zr-Co-Ce alloy [5] have been demonstrated.…”

Section: Introductionmentioning

confidence: 99%

Characterization of the activation of yttrium-based getter films by electrical measurements and ion-beam analyses

Bessouet¹,

Lemettre²,

Bosseboeuf³

et al. 2019

2019 Symposium on Design, Test, Integration &Amp; Packaging of MEMS and MOEMS (DTIP)

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HAL is a multidisciplinary open access archive for the deposit and dissemination of scientific research documents, whether they are published or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers. L'archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d'enseignement et de recherche français ou étrangers, des laboratoires publics ou privés.

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ZrCoCe Getter Films for MEMS Vacuum Packaging

Cited by 17 publications

References 9 publications

Temperature-Dependent in Situ Studies of Volatile Molecule Trapping in Low-Temperature-Activated Zr Alloy-Based Getters

Temperature-Dependent in Situ Studies of Volatile Molecule Trapping in Low-Temperature-Activated Zr Alloy-Based Getters

Bonding formation and gas absorption using Au/Pt/Ti layers for vacuum packaging

Characterization of the activation of yttrium-based getter films by electrical measurements and ion-beam analyses

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