A crystallized SrTiO 3 (STO) nanocoating on a primary SiO 2 nanoparticle was produced by metal alkoxide processing with chemical modification. The coated layer surface morphology and the coating amount were controlled by molecular design of the STO precursor solution. When using a partially hydrolyzed precursor solution (a partially polymerized precursor solution), an approximately 10-nm-thick homogeneous STO coating layer was obtained on a SiO 2 core particle. From these findings, we concluded that the alkoxide process is an effective method to obtain a homogeneous nanocoating with a complex metal oxide.